Journal of Electrical Engineering and Technology

  • 제7권4호
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  • Pages.596-600
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  • 2012
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  • 1975-0102(pISSN)
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  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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Highly transparent and resistive nanocrystalline ZnO-SnO2 films prepared by rf magnetron sputtering

  • Cha, Chun-Nam (Division of Industrial System Engineering and ERI, Gyeongsang National University) ;
  • Choi, Mu-Hee (Dept. of Electrical Engineering, and ERI, Gyeongsang National University) ;
  • Ma, Tae-Young (Dept. of Electrical Engineering, and ERI, Gyeongsang National University)
  • 투고 : 2011.05.22
  • 심사 : 2012.02.17
  • 발행 : 2012.07.01
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초록

ZnO-$SnO_2$ films were deposited by rf magnetron sputtering using a ZnO-$SnO_2$ (2:1 molar ratio) target. The target was made from a mixture of ZnO and $SnO_2$ powders calcined at $800^{\circ}C$. The working pressure was 1 mTorr, and the rf power was 120 W. The ratio of oxygen to argon ($O_2$:Ar) was varied from 0% to 10%, and the substrate temperature was varied from $27^{\circ}C$ to $300^{\circ}C$. The crystallographic properties and the surface morphologies of the films were studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force spectroscopy (AFM). The ZnO-$SnO_2$ films deposited in $O_2$:Ar = 10% exhibited resistivity higher than $10^6{\Omega}cm$ and transmittance of more than 80% in the visible range.

키워드

참고문헌

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피인용 문헌

  1. Effects of an Aluminum Contact on the Carrier Mobility and Threshold Voltage of Zinc Tin Oxide Transparent Thin Film Transistors vol.9, pp.2, 2014, https://doi.org/10.5370/JEET.2014.9.2.609
  2. Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering vol.286, 2013, https://doi.org/10.1016/j.apsusc.2013.09.035
  3. Characterization of green synthesized nano-formulation (ZnO–A. vera) and their antibacterial activity against pathogens vol.39, pp.2, 2015, https://doi.org/10.1016/j.etap.2015.01.015
  4. Influence of indium doping on the properties of zinc tin oxide films and its application to transparent thin film transistors vol.550, 2014, https://doi.org/10.1016/j.tsf.2013.10.182
  5. Effect of SnO2 concentration on the tuning of optical and electrical properties of ZnO-SnO2 composite thin films vol.117, pp.2, 2015, https://doi.org/10.1063/1.4905835