Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization and Gas-sensing Performance of Spray Pyrolysed In2O3 Thin Films: Substrate Temperature Effect

  • khatibani, A. Bagheri (Department of physics, faculty of science, Islamic Azad University) ;
  • Ziabari, A. Abdolahzadeh (Department of physics, faculty of science, Islamic Azad University) ;
  • Rozati, S.M. (Department of Physics, Faculty of Science, The University of Guilan) ;
  • Bargbidi, Z. (Department of Physics, Faculty of Science, The University of Guilan) ;
  • Kiriakidis, G. (IESL/FORTH and Department of Physics, University of Crete)
  • Received : 2012.01.15
  • Accepted : 2012.03.21
  • Published : 2012.06.25
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Abstract

Spray pyrolysis method was applied for the preparation of indium oxide ($In_2O_3$) thin films, by varying the substrate temperature range from 400-$600^{\circ}C$. All the samples were characterized at room temperature by using X-Ray diffraction, Scanning electron microscopy, Atomic Force Microscopy, Hall Effect and UV-Visible spectrophotometry. The optimal substrate temperature required for obtaining films of high crystallographic quality was $575^{\circ}C$. By comparing optical transmittance and electrical conductivity it was observed that the best figure of merit for these films was achieved for the same temperature and electrical resistivity was in the order of ${\rho}=1.47{\times}10^{-1}[{\Omega}cm]$. Gas sensing measurements of the films in ethanol showed enhancement with surface roughness and sheet resistance.

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References

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