Progress in Superconductivity and Cryogenics (한국초전도ㆍ저온공학회논문지)

The Korean Society of Superconductivity and Cryogenics (한국초전도저온학회)
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Low temperature deposition of LaMnO3 on IBAD-MgO template assisted by plasma

IBAD-MgO 기판상에 플라즈마를 이용한 LaMnO3 저온 증착

  • 김호섭 (한국전기연구원 초전도연구센터) ;
  • 오상수 (한국전기연구원 초전도연구센터) ;
  • 하동우 (한국전기연구원 초전도연구센터) ;
  • 하홍수 (한국전기연구원 초전도연구센터) ;
  • 고락길 (한국전기연구원 초전도연구센터) ;
  • 문승현 ((주)서남)
  • Received : 2012.01.27
  • Accepted : 2012.03.07
  • Published : 2012.03.31
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Abstract

LMO($LaMnO_3$) buffer layer of superconducting coated conductor was deposited on IBAD-MgO template in the plasma atmosphere at $650^{\circ}C$ which is relatively low compared with conventional deposition temperature of more than $800^{\circ}C$. Deposition method of LMO was DC sputtering, and target and deposition chamber were connected to the cathode and anode respectively. When DC voltage was applied between target and chamber, plasma was formed on the surface of target. The tape substrate was located with the distance of 10 cm between target and tape substrate. When anode bias was connected to the tape substrate, electrons were attracted from plasma in target surface to the tape substrate, and only tape substrate was heated by electron bombardment without heating any other zone. The effect of electron bombardment on the surface of substrate was investigated by increasing bias voltage to the substrate. We found out that the sample of electron bombardment had the effect of surface heating and had good texturing at low controlling temperature.

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References

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