DOI QR코드

DOI QR Code

An Experimental Study on Energy Consumption of Air Washer Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms

반도체 클린룸용 에어와셔 외기공조시스템의 에너지소비량에 관한 실험적 연구

  • Kim, Ki-Cheol (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Kim, Hyung-Tae (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Song, Gen-Soo (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Son, Seung-Woo (Sunglim PS Co.) ;
  • Shin, Dae-Kun (Daehan PNC Co.) ;
  • Park, Dug-Jun (Shinsung ENG Co.)
  • 김기철 (한국생산기술연구원 나노오염제어연구실) ;
  • 김형태 (한국생산기술연구원 나노오염제어연구실) ;
  • 송근수 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 손승우 ((주)성림피에스) ;
  • 신대건 ((주)대한피엔씨) ;
  • 박덕준 ((주)신성이엔지)
  • Received : 2011.12.12
  • Published : 2012.04.10

Abstract

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

Keywords

References

  1. Yamamoto, H., Katsuki, T., Fujisawa, S., Yosa, K., Nishiwaki, S., Nabeshima, Y., and Oda, H., 2003, Removal of gaseous chemical contaminants as well as heat recovery by air washer(Part 3), Proceedings, the 21st Annual Technical Meeting on Air Cleaning and Contamination Control, Tokyo, pp. 151-154 (in Japanese).
  2. Yoo, K. H., 2007, Reduction of air conditioning energy in semiconductor/display manufacturing clean rooms, Air Cleaning Technology, KACA, Vol. 20, No. 4, pp. 1-18.
  3. Hu, S. C., Wu, J. S., Chan, D. Y. L., Hsu, R. T. C., and Lee, J. C. C., 2008, Power consumption benchmark for a semiconductor cleanroom facility system, Energy and Buildings, Vol. 40, pp. 1765-1770. https://doi.org/10.1016/j.enbuild.2008.03.006
  4. Fujisawa, L., Moriya, M., Yosa, K., Ikuta, M., Yamamoto H., and Nabeshima, Y., 2001, Removal of chemical contaminants as well as heat recovery by air washer (part 1), Proceedings, the 19th Annual Technical Meeting on Air Cleaning and Contamination Control, Tokyo, pp. 166-168 (in Japanese).
  5. Fujisawa, S., Moriya, M., Yosa, K., Nishiwaki, S., Yamamoto H., Katsuki, T., Nabeshima, Y., and Oda, H., 2002, Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 2), Proceedings, the 20th Annual Technical Meeting on Air Cleaning and Contamination Control, Tokyo, pp. 162-165 (in Japanese).
  6. Yeo, K. H. and Yoo, K. H., 2006, An experiment on the characteristics of heat recovery, particle collection and gas removal in an air washer system for semiconductor clean rooms, Journal of Korean Society for Indoor Environment, Vol. 3, No. 2, pp. 131-140.
  7. Song, G. S., Yoo, K. H., Kang, S. Y., and Son, S. W., 2009, An experimental study on energy reduction of an exhaust air heat recovery type outdoor air conditioning system for semiconductor manufacturing clean rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, Vol. 21, No. 5, pp. 273-281.
  8. Song, G. S., Kim, H. T., Yoo, K. H., Son, S. W., Shin, D. K., and Kim, Y. I., 2010, Numerical analysis on energy reduction of an exhaust-air-heat-recovery type air washer system for semiconductor manufacturing clean rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, Vol. 22, No. 10, pp. 697-703.
  9. Ebine, T., Yoshida, H., Nishikawa, M., and Taura, H., 2005, Precision humidity control system by wetted-element humidifier and the cost reduction effect-(Part 2) Study on the system which used low temperature water, Proceedings, the 23th Annual Technical Meeting on Air Cleaning and Contamination Control, Tokyo, pp. 190-193 (in Japanese).
  10. Tsao, J.-M., Hu, S.-C., Xu, T., and Chan, D. Y. L., 2010, Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate, Energy and Buildings, Vol. 42, pp. 2005-2013. https://doi.org/10.1016/j.enbuild.2010.06.009
  11. Kim, H. T., Song, G. S., Kim, K. C., Yoo, K. H., Son, S. W., Shin, D. K., Park, D. J., and Kwon, O. M., 2011, Comparative study on energy consumption in steam-humidificationand water-spray-humidification-type outdoor air conditioning systems for semiconductor manufacturing clean rooms, Transactions of the KSME B, Vol. 35, No. 12, pp. 1249-1255.