Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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An Experimental Study on Energy Consumption of Air Washer Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms

반도체 클린룸용 에어와셔 외기공조시스템의 에너지소비량에 관한 실험적 연구

  • Kim, Ki-Cheol (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Kim, Hyung-Tae (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Song, Gen-Soo (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Son, Seung-Woo (Sunglim PS Co.) ;
  • Shin, Dae-Kun (Daehan PNC Co.) ;
  • Park, Dug-Jun (Shinsung ENG Co.)
  • 김기철 (한국생산기술연구원 나노오염제어연구실) ;
  • 김형태 (한국생산기술연구원 나노오염제어연구실) ;
  • 송근수 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 손승우 ((주)성림피에스) ;
  • 신대건 ((주)대한피엔씨) ;
  • 박덕준 ((주)신성이엔지)
  • Received : 2011.12.12
  • Published : 2012.04.10
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Abstract

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

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References

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