Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Manufacturing of Micro Gas Bearing by Fe-Ni Nanopowder and Metal Mold Using LIGA

LIGA 금형몰드를 이용한 Fe-Ni계 나노분말의 초미세 가스베어링 제조

  • 손수정 (한국기계연구원 부설 재료연구소) ;
  • 조영상 (한국기계연구원 부설 재료연구소) ;
  • 김대종 ;
  • 김종현 (포항공대 가속기연구소) ;
  • 장석상 (포항공대 가속기연구소) ;
  • 최철진 (한국기계연구원 부설 재료연구소)
  • Received : 2012.02.09
  • Accepted : 2012.03.16
  • Published : 2012.04.28
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Abstract

This paper describes the manufacturing process of tilting pad gas bearing with a diameter of 5 mm and a length of 0.5-1 mm for power MEMS (Micro Electomechanical Systems) applications. The bearing compacts with nanopowder feedstock were prepared by Ni-metal mold with 2-mold system using LIGA process. The effect of the manufacturing conditions on sintering properties of nanopowder gas bearing was investigated. In this work, Fe-45 wt%Ni nanopowder with an average diameter of 30-50 nm size was used as starting material. After mixing the nanopowder and the wax-based binders, the amount of powder was controlled to obtain the certain mixing ratio. The nanopowder bearing compacts were sintered with 1-2 hr holding time under hydrogen atmospheres and under temperatures of $600^{\circ}C$ to $1,000^{\circ}C$. Finally, the critical batch of mixed powder system was found to be 70% particle fraction in total volume. The maximum density of the sintered bearing specimen was about 94% of theoretical density.

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References

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