한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제29권3호
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  • Pages.247-252
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  • 2012
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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단결정 사파이어 광학소자의 ELID 경면연삭 가공 특성

Properties of ELID Mirror-Surface Grinding for Single Crystal Sapphire Optics

  • Kwak, Jae-Seob (Department of Mechanical Engineering, Pukyong National Univ.) ;
  • Kim, Geon-Hee (Korea Basic Science Institute) ;
  • Lee, Yong-Chul (Department of Computer aided mechanics, Yonam Institute of Digital Technology) ;
  • Ohmori, Hitoshi (Materials Fabrication Laboratory, RIKEN) ;
  • Kwak, Tae-Soo (Department of Mechanical Engineering, Gyeongnam National University of Science and Technology)
  • 투고 : 2012.01.17
  • 심사 : 2012.01.31
  • 발행 : 2012.03.01
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초록

This study has been focused on application of ELID mirror-surface grinding technology for manufacturing single crystal optic sapphire. Single crystal sapphire is a superior material with optic properties of high performance as light transmission, thermal conductivity, hardness and so on. Mirror-surface machining technology is necessary to use sapphire as optic parts. The ELID grinding system has been set up for machining of the sapphire material. According to the ELID experimental results, it shows that the surface of sapphire can be eliminated by metal bonded wheel with micron abrasives and the surface roughness of 60nmRa can be gotten using grinding wheel of 2,000 mesh in 4.5um, depth of cut. In this study, the chemical experiments after ELID grinding also has been conducted to check chemical reaction between workpiece and grinding wheel on ELID grinding process. It shows that the chemical reaction has not happened as the results of the chemical experiments.

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참고문헌

  1. Kim, K., Ahn, Y., Seo, J. and Park, J., "Comparison of flux and natural sapphire after heat-treatment," J. of the Korean Crystal Growth and Crystal Technology, Vol. 19, No. 3, pp. 152-158, 2009.
  2. Kim, Y., Kwak, T. and Kim, K., "Mirror-surface Machining Properties of Structural Ceramics using Diamond Abrasives," J. of the Korean Ceramic Society, Vol. 47, No. 4, pp. 290-295, 2010. https://doi.org/10.4191/KCERS.2010.47.4.290
  3. Ohmori, H. and Nakagawa, T., "Mirror Surface Grinding of Silicon Wafer with Electrolytic Inprocess Dressing," Annals of the Int. Academy for Prod. Eng., Vol. 39, No. 1, pp. 329-332, 1990.
  4. Ohmori, H. and Nakagawa, T., "Analysis of Mirror Surface Generation of Hard and Brittle Materials by ELID(Electrolytic In-Process Dressing) Grinding with Superfine Grain Metallic Bond Wheels," Annals of the Int. Academy for Prod. Eng., Vol. 44, No. 1, pp. 287-290, 1995.
  5. Dai, Y., Ohmori, H., Watanabe, Y., Eto, H., Lin, W. and Suzuki, T., "Subsurface Properties of Ceramics for Lightweight Mirrors after ELID Grinding," Int. J. of Jpn, Soc. of Mech. Eng., Series C, Vol. 47, No. 1, pp. 66-71, 2004.
  6. Kwak, T. and Ohmori, H., "Nano-level Mirror Surface Machining Technology for SiC Ceramics Mirror," J. of the Korea Society of Precision Engineering, Vol. 23 No. 6, pp. 29-36, 2006.
  7. Kwak, T., "Machining Properties to Nano-Level Mirror Surface Finishing for Fine Grained WC-Co 18% Alloy using Magnetic Polishing Slurry," J. of the Korean Ceramic Society, Vol. 46, No. 1, pp. 102-107, 2009. https://doi.org/10.4191/KCERS.2009.46.1.102

피인용 문헌

  1. A Study on Characteristics of ELID Lapping for Sapphire Wafer Material vol.29, pp.12, 2012, https://doi.org/10.7736/KSPE.2012.29.12.1285
  2. Development of Auto-Control Power Supply of ELID Electrolysis Speed for Metal-Bonded Grinding Wheel vol.33, pp.11, 2016, https://doi.org/10.7736/KSPE.2016.33.11.899