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피인용 문헌
- DC 스퍼터법과 유도결합 플라즈마 마그네트론 스퍼터법으로 증착된 수퍼하드 TiN 코팅막의 물성 비교연구 vol.46, pp.2, 2012, https://doi.org/10.5695/jkise.2013.46.2.055