한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제21권6호
  • /
  • Pages.855-859
  • /
  • 2012
  • /
  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지
DOI QR코드

DOI QR Code

다공성 실리콘 나노선의 제작 및 광학적 특성 분석

Fabrication and Optical Characterization of Porous Silicon Nanowires

  • 김정길 (경희대학교 대학원 물리학과) ;
  • 최석호 (경희대학교 응용과학대학 응용물리학과)
  • 투고 : 2012.11.02
  • 심사 : 2012.11.15
  • 발행 : 2012.12.15
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Silicon nanowires (SiNWs) were fabricated by a metal-assisted chemical etching of Si and the porous structure on their surfaces was controlled by changing the volume ratio of the etching solution composed of hydrofluoric acid, hydrogen peroxide, and deionized water. The concentration of hydrogen peroxide as the oxidant was varied for controlling the porosity of SiNWs. The optical properties of porous SiNWs were unique and very different from those of single-crystalline Si, as characterized by measuring their photoluminescence and Raman spectra for different porosities.

키워드

참고문헌

  1. Li, Z., Chen, Y., Li, X., Kamins, T. I., Nauka, K., and Williams, R. S., 2004, "Sequence-specific Label-free DNA Sensors Based on Silicon Nanowires," Nano Lett., Vol. 4, No. 2, pp. 245-247. https://doi.org/10.1021/nl034958e
  2. Hahm, J., and Lieber, C. M., 2004, "Direct Ultrasensitive Electrical Detection of DNA And DNA Sequence Variations using Nanowire Nanosensors," Nano Lett., Vol. 4, No. 1, pp. 51-54. https://doi.org/10.1021/nl034853b
  3. Cui, Y., Wei, Q. Q., Park, H. K., and Lieber, C. M., 2001, "Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species," Science, Vol. 293, No. 5533, pp. 1289-1292. https://doi.org/10.1126/science.1062711
  4. Koo, S. M., Li, Q. L., Edelstein, M. D., Richter, C. A., and Vogel, E. M., 2005, "Enhanced Channel Modulation in Dual-gated Silicon Nanowire Transistors," Nano Lett., Vol. 5, No. 12, pp. 2519-2523. https://doi.org/10.1021/nl051855i
  5. Cui, Y., Zhong, Z. H., Wang, D. L., Wang, W. U., and Lieber, C. M., 2003, "High Performance Silicon Nanowire Field Effect Transistors," Nano Lett., Vol. 3, No. 2, pp. 149-152. https://doi.org/10.1021/nl025875l
  6. Duan, X. F., Huang, Y., and Lieber, C. M., 2002, "Nonvolatile Memory and Programmable Logic from Molecule-gated Nanowires," Nano Lett., Vol. 2, No. 5, pp. 487-490. https://doi.org/10.1021/nl025532n
  7. Huang, Y., Duan, X. F., Cui, Y., Lauhon, L. J., Kim, K. H., and Lieber, C. M., 2001, "Logic Gates and Computation from Assembled Nanowire Building Blocks," Science, Vol. 294, No. 5545, pp. 1313-1317. https://doi.org/10.1126/science.1066192
  8. Cui, Y., and Lieber, C. M., 2001, "Functional Nanoscale Electronic Devices Assembled using Silicon Nanowire Building Blocks," Science, Vol. 291, No. 5505, pp. 851-853. https://doi.org/10.1126/science.291.5505.851
  9. Ma, D. D. D., Lee, C. S., Au, F. C. K., Tong, S. Y. and Lee, S. T., 2003, "Small-diameter Silicon Nanowire Surfaces," Science, Vol. 299, No. 5614, pp. 1874-1877. https://doi.org/10.1126/science.1080313
  10. Read, A. J., Needs, R. J., Nash, K. J., Canham, L. T., Calcott, P. D. J., and Qteish, A., 1993, "First-principles Calculations of the Electronic Properties of Silicon Quantum Wires," Physical Review Letters, Vol. 70, No. 13, pp. 2050-2050. https://doi.org/10.1103/PhysRevLett.70.2050
  11. Delerue, C., Allan, G., and Lannoo, M., 1993, "Theoretical Aspects of The Luminescence of Porous Silicon," Physical Review B, Vol. 48, No. 15, pp. 11024-11036. https://doi.org/10.1103/PhysRevB.48.11024
  12. Doh, Y. J., van Dam, J. A., Roest, A. L., Bakkers, E., Kouwenhoven, L. P., and De Franceschi, S., 2005, "Tunable Supercurrent through Semiconductor Nanowires," Science, Vol. 309, No. 5732, pp. 272-275. https://doi.org/10.1126/science.1113523
  13. Blomers, C., Schapers, T., Richter, T., Calarco, R., Luth, H., and Marso, M., 2008, "Temperature Dependence of The Phase-coherence Length in InN Nanowires," Appl. Phys. Lett., Vol. 92, No. 13, pp. 132101-1-132101-3. https://doi.org/10.1063/1.2905268
  14. Hansen, A. E., Bjork, M. T., Fasth, C., Thelander, C., and Samuelson, L., 2005, "Spin Relaxation in InAs Nanowires Studied by Tunable Weak Antilocalization," Physical Review B, Vol. 71, No. 20, pp. 205328-1-205328-5. https://doi.org/10.1103/PhysRevB.71.205328
  15. A. Bachtold, C. S., Salvetat, J. -P., Bonard, J. -M., Forro, L., Nussbaumer, T., and Schenenberger, C., 1999, "Aharonov-bohm Oscillations in Carbon Nanotubes," Nature, Vol. 397, No. 6721, pp. 673-675. https://doi.org/10.1038/17755
  16. J. Westwater, D. P. G., Tomiya, S., Usui, S., and Ruda, H., 1997, "Growth of Silicon Nanowires via Gold/Silane Vapor-liquid-solid Reaction," J. Vac. Sci. Technol. B, Vol. 15, No. 3, pp. 554-557. https://doi.org/10.1116/1.589291
  17. Zhang, Y. J., Zhang, Q., Wang, N. L., Yan, Y. J., Zhou, H. H., and Zhu, J., 2001, "Synthesis of Thin Si Whiskers (Nanowires) using $SiCl_{4}$," J. Cryst. Growth, Vol. 226, No. 2-3, pp. 185-191. https://doi.org/10.1016/S0022-0248(01)01360-4
  18. Fujii, H., Matsukawa, T., Kanemaru, S., Yokoyama, H., and Itoh, J., 2001, "Characterization of Electrical Conduction in Silicon Nanowire by Scanning Maxwellstress Microscopy," Appl. Phys. Lett., Vol. 78, No. 17, pp. 2560-2562. https://doi.org/10.1063/1.1365416
  19. Choi, Y. K., Zhu, J., Grunes, J., Bokor, J., and Somorjai, G. A., 2003, "Fabrication of Sub-10nm Silicon Nanowire Arrays by Size Reduction Lithography," J. Phys. Chem. B, Vol. 107, No. 15, pp. 3340-3343. https://doi.org/10.1021/jp0222649
  20. Chang, K. M., You, K. S., Lin, J. H., and Sheu, J. T., 2004, "An Alternative Process for Silicon Nanowire Fabrication with SPL And Wet Etching System," J. Electrochem. Soc., Vol. 151, No. 10, pp. G679-G682. https://doi.org/10.1149/1.1795254
  21. Juhasz, R., Elfstrom, N., and Linnros, J., 2005, "Controlled Fabrication of Silicon Nanowires by Electron Beam Lithography and Electrochemical Size Reduction," Nano Lett., Vol. 5, No. 2, pp. 275-280. https://doi.org/10.1021/nl0481573
  22. Hannah, D. C., Yang, J. H., Podsiadlo, P., Chan, M. K. Y., Demortiere, A., Gosztola, D. J., Prakapenka, V. B., Schatz, G. C., Kortshagen, U., and Schaller, R. D, 2012, "On the Origin of Photoluminescence in Silicon Nanocrystals: Pressure-dependent Structural and Optical Studies," Nano Lett., Vol. 12, No. 8, pp. 4200-4205. https://doi.org/10.1021/nl301787g
  23. Walavalkar, S. S., Hofmann, C. E., Homyk, A. P., Henry, M. D., Atwater, H. A., and Scherer, A., 2010, "Tunable Visible and Near-IR Emission from Sub-10nm Etched Single-crystal Si Nanopillars," Nano lett., Vol. 10, No. 11, pp. 4423-4428. https://doi.org/10.1021/nl102140k