Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Measurement of Mechanical Properties of Thin Films Using a Combination of the Bulge Test and Nanoindentation

벌지 실험과 나노 압입 실험을 통한 박막의 기계적 물성 측정

  • Received : 2011.04.22
  • Accepted : 2011.11.15
  • Published : 2012.02.01
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Abstract

This paper discusses two different techniques used to measure the mechanical properties of thin films: the bulge test and the nanoindentation test. In the bulge test, a uniform pressure is applied to one side of the film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as Young's modulus, and the residual stress. A nanoindentation test is performed by pushing an indenter tip into the specimen and then withdrawing it, and then recording the indentation force as a function of the indenter position. A modified King's model is used to estimate the mechanical properties of the thin film in order to avoid the effects of the substrate layers. A combination of both the bulge test and the nanoindentation test can determine both Young's modulus and Poisson's ratio simultaneously.

본 연구에서는 벌지 실험과 나노 압입 실험을 통해 박막의 기계적 물성을 측정하였다. 벌지 실험은 외적 지지구조를 가지지 않는 박막 시편의 한 면에 일정한 압력을 가하여 박막의 변위를 측정, 압력과 변위의 관계를 이용하여 박막의 기계적 물성을 측정하는 실험이다. 나노 압입 실험은 시편에 압입 방향으로의 하중과 시편의 표면으로부터 압입자의 깊이에 대한 데이터를 통하여 시편의 기계적 물성을 측정하는 실험으로 modified King's model 을 이용하여 모재의 영향이 고려된 박막의 물성을 구할 수 있다. 두 실험은 탄성 계수와 푸아송비의 수학적 관계가 다르기 때문에 벌지 실험과 나노 압입 실험결과로부터 박막의 탄성계수와 푸아송비를 동시에 측정할 수 있다.

Keywords

References

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