Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development of the high-temperature, high-pressure Dynamic pressure sensor with LGT

LGT를 이용한 고온, 고압용 동압 센서 개발

  • Kwon, Hyuk Jae (Department of Bio-electronic engineering, Andong University) ;
  • Lee, Kyung Il (Research Institute of Industrial Science & Technology) ;
  • Kim, Dong Su (Research Institute of Industrial Science & Technology) ;
  • Kim, Young Deog (Research Institute of Industrial Science & Technology) ;
  • Lee, Young Tae (Department of Bio-electronic engineering, Andong University)
  • 권혁제 (안동대학교 바이오전자공학과) ;
  • 이경일 (포항산업과학연구원) ;
  • 김동수 (포항산업과학연구원) ;
  • 김영덕 (포항산업과학연구원) ;
  • 이영태 (안동대학교 바이오전자공학과)
  • Received : 2012.05.16
  • Accepted : 2012.06.15
  • Published : 2012.06.30
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Abstract

This study developed a high-temperature, high-pressure dynamic pressure sensor using LGT(lanthanum gallium tantalate). The sensitivity of the fabricated dynamic pressure sensor was 2.1 mV/kPa and its nonlinearity was 2.5%FS. We confirmed that the high-temperature dynamic pressure sensor operated stably in high-temperature environment at $500^{\circ}C$. The developed dynamic pressure sensor using LGT is expected to be applicable not only to gas turbines but also in various industrial areas in duding airplanes and power stations.

Keywords

References

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