Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Study of ZnO Thin Film for SAW Filter by PLD and RF Magnetron Sputtering

PLD와 RF 마그네트론 스퍼터링을 이용한 SAW 필터용 ZnO 박막의 특성 연구

  • Lee, Seung-Hwan (Convergence of IT Devices Institute Busan, Dong-Eui University) ;
  • Yu, Yun-Sik (Convergence of IT Devices Institute Busan, Dong-Eui University)
  • 이승환 (동의대학교, 부산IT융합부품연구소) ;
  • 유윤식 (동의대학교, 부산IT융합부품연구소)
  • Received : 2012.11.12
  • Accepted : 2012.11.21
  • Published : 2012.12.01
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Abstract

We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was $0.92^{\circ}$. We demonstrated the SAW filter with bandwidth of approximately 0.97 MHz and the center frequency of 18.72 MHz using the proposed ZnO thin film.

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References

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