References
- Lin, Y.-Y., Chen, D.-Y., and Ma, C., "Simulations of a Stress and Contact Model in a Chemical Mechanical Polishing Process," Thin Solid Films, Vol. 517, No. 21, pp. 6027-6033, 2009. https://doi.org/10.1016/j.tsf.2009.05.021
- Saka, N., Eusner, T., and Chun, J. H., "Nano-Scale Scratching in Chemical-Mechanical Polishing," CIRP Annals - Manufacturing Technology, Vol. 57, No. 1, pp. 341-344, 2008. https://doi.org/10.1016/j.cirp.2008.03.098
- Bielawski, M. and Beres, W., "Fe Modelling of Surface Stresses in Erosion-Resistant Coatings under Single Particle Impact," Wear, Vol. 262, No. 1-2, pp. 167-175, 2007. https://doi.org/10.1016/j.wear.2006.04.009
- Wensink, H. and Elwenspoek, M. C., "A Closer Look at the Ductile-Brittle Transition in Solid Particle Erosion," Wear, Vol. 253, No. 9-10, pp. 1035-1043, 2002. https://doi.org/10.1016/S0043-1648(02)00223-5
- 김동균, 성인하, "입자연마가공에서의 입자 형상의 영향에 대한 고찰," 한국윤활학회지, Vol. 26, No. 4, pp. 219-223, 2010.
- Sung, I.-H., "On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process," Journal of the KSTLE, Vol. 25, No. 6, pp. 404-408, 2009.
- Oliver, M. R., "Chemical Mechanical Polishing," Semiconductor International, Vol. 26, No. 6, p. 130, 2003.
- 양우열, 양지철, 성인하, "입자연마가공에서의 압력 속도 및 유체점도의 영향에 대한 고찰," 한국윤활학회지, to be published.
- Bathe, K., Zhang, H., and Ji, S., "Finite Element Analysis of Fluid Flows Fully Coupled with Structural Interactions," Computers and Structures, Vol. 72, No. 1, pp. 1-16, 1999. https://doi.org/10.1016/S0045-7949(99)00042-5
- De, S., Hong, J., and Bathe, K., "On the Method of Finite Spheres in Applications: Towards the Use with Adina and in a Surgical Simulator," Computational Mechanics, Vol. 31, No. 1, pp. 27-37, 2003. https://doi.org/10.1007/s00466-002-0390-3
- Li, Y., Microelectronic Applications of Chemical Mechanical Planarization, Wiley-Interscience, 2007.
-
Feng, J., Wang, D., and Liu, H. et al., "Finite Element Simulation of Thermal Stress During Diffusion Bonding of
$Al_2O_3$ Ceramic to Aluminium," Science and Technology of Welding and Joining, Vol. 8, No. 2, pp. 138-142, 2003. https://doi.org/10.1179/136217103225008838 - Desale, G. R., Gandhi, B. K., and Jain, S. C., "Particle Size Effects on the Slurry Erosion of Aluminium Alloy (Aa 6063)," Wear, Vol. 266, No. 11-12, pp. 1066-1071, 2009. https://doi.org/10.1016/j.wear.2009.01.002
- Clark, H. M. and Hartwich, R. B., "A Re-Examination of the `Particle Size Effect' in Slurry Erosion," Wear, Vol. 248, No. 1-2, pp. 147-161, 2001. https://doi.org/10.1016/S0043-1648(00)00556-1
- Gandhi, B. K. and Borse, S. V., "Nominal Particle Size of Multi-Sized Particulate Slurries for Evaluation of Erosion Wear and Effect of Fine Particles," Wear, Vol. 257, No. 1-2, pp. 73-79, 2004. https://doi.org/10.1016/j.wear.2003.10.013
- Finnie, I., "Erosion of Surfaces by Solid Particles," Wear, Vol. 3, No. 2, pp. 87-103, 1960. https://doi.org/10.1016/0043-1648(60)90055-7
- Oka, Y., Mihara, S., and Yoshida, T., "Impact-Angle Dependence and Estimation of Erosion Damage to Ceramic Materials Caused by Solid Particle Impact," Wear, Vol. 267, No. 1-4, pp. 129-135, 2009. https://doi.org/10.1016/j.wear.2008.12.091
- Lopez, D., Congote, J. P., and Cano, J. R. et al., "Effect of Particle Velocity and Impact Angle on the Corrosion-Erosion of AISI 304 and AISI 420 Stainless Steels," Wear, Vol. 259, No. 1-6, pp. 118-124.
- Sugiyama, K., Harada, K., and Hattori, S., "Influence of Impact Angle of Solid Particles on Erosion by Slurry Jet," Wear, Vol. 265, No. 5-6, pp. 713-720, 2008. https://doi.org/10.1016/j.wear.2008.01.020
- Al-Bukhaiti, M., Ahmed, S., and Badran, F. et al., "Effect of Impingement Angle on Slurry Erosion Behaviour and Mechanisms of 1017 Steel and High-Chromium White Cast Iron," Wear, Vol. 262, No. 9-10, pp. 1187-1198, 2007. https://doi.org/10.1016/j.wear.2006.11.018
Cited by
- Slurry Particle behavior inside Pad Pore during Chemical Mechanical Polishing vol.28, pp.1, 2012, https://doi.org/10.9725/kstle.2012.28.1.007
- 화학기계적 연마기술 연구개발 동향: 입자 거동과 기판소재를 중심으로 vol.35, pp.5, 2019, https://doi.org/10.9725/kts.2019.35.5.274