Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of the Dielectric Barrier Discharge Plasma Generator for the Eco-friendly Cleaning Process of the Electronic Components

전자부품의 친환경 세정공정 적용을 위한 유전체장벽 방전 플라즈마 생성 장치 개발

  • 손영수 (한국기계연구원 로봇메카트로닉스연구센터) ;
  • 함상용 (한국기계연구원 로봇메카트로닉스연구센터) ;
  • 김병인 (한국기계연구원 로봇메카트로닉스연구센터)
  • Received : 2011.01.14
  • Accepted : 2011.07.06
  • Published : 2011.10.01
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Abstract

In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

Keywords

References

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