나노초 펄스 레이저를 이용한 발광폴리머 패터닝

Selective Ablation of Emissive Polymer Using Nanosecond-pulsed Laser

  • 고정수 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 오부국 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 김두영 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 이재영 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 이승기 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 정수화 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹) ;
  • 홍순국 (LG 생산기술원 기반기술연구실 레이저/성막 기술그룹)
  • Ko, J.S. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Oh, B.K. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Kim, D.Y. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Lee, J.Y. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Lee, S.K. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Jung, S.H. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics) ;
  • Hong, S.K. (Laser&deposition Technology Group, Production engineering Research Institute, LG Electronics)
  • 투고 : 2011.05.04
  • 심사 : 2011.09.26
  • 발행 : 2011.09.30

초록

As an active emission display using emissive polymer has had much attention recently, needs for a selective patterning of emissive layer for those displays have been increased abruptly. Therefore, the various laser sources in terms of its wavelength has been used for laser direct patterning. In this work, the feasibility of those processes is examined using numerical analysis and the experimental investigation. A sample has multi-layered structure, emissive polymer on aluminum which is deposited on a glass substrate. Key factors for optimizing the laser patterning of the emissive polymer are considered into the control of ablation products, large-sized particle, and the choice of the appropriate wavelength for minimizing the heat affected zone and the remnant layer.

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