Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Spectroscopic and Morphological Investigation of Copper Oxide Thin Films Prepared by Magnetron Sputtering at Various Oxygen Ratios

  • Park, Ju-Yun (Department of Chemistry, Pukyong National University) ;
  • Lim, Kyoung-A (Department of Physics, The University of Akron) ;
  • Ramsier, Rex D. (Department of Physics, The University of Akron) ;
  • Kang, Yong-Cheol (Department of Chemistry, Pukyong National University)
  • Received : 2011.06.22
  • Accepted : 2011.07.29
  • Published : 2011.09.20
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Abstract

Copper oxide thin films were synthesized by reactive radio frequency magnetron sputtering at different oxygen gas ratios. The chemical and physical properties of the thin films were investigated by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM), and X-ray diffraction (XRD). XPS results revealed that the dominant oxidation states of Cu were $Cu^0$ and $Cu^+$ at 0% oxygen ratio. When the oxygen ratios increased above 5%, Cu was oxidized as CuO as detected by X-ray induced Auger electron spectroscopy and the $Cu(OH)_2$ phase was confirmed independent of the oxygen ratio. The valence band maxima were $1.19{\pm}0.09$ eV and an increase in the density of states was confirmed after formation of CuO. The thickness and roughness of copper oxide thin films decreased with increasing oxygen ratio. The crystallinity of the copper oxide films changed from cubic Cu through cubic $Cu_2O$ to monoclinic CuO with mean crystallite sizes of 8.8 nm (Cu) and 16.9 nm (CuO) at the 10% oxygen ratio level.

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References

  1. Qu, X. P.; Tan, J. J.; Zhou, M.; Chen, T.; Xie, Q.; Ru, G. P. Appl. Phys. Lett. 2006, 88, 151912. https://doi.org/10.1063/1.2195112
  2. Yan, M. Y.; Suh, J. O.; Ren, F.; Tu, K. N.; Vairagar, A. V.; Mhaisalkar, S. G. Appl. Phys. Lett. 2005, 87, 211103. https://doi.org/10.1063/1.2132536
  3. Park, C. W.; Vook, R. W. Appl. Phys. Lett. 1991, 59, 175. https://doi.org/10.1063/1.106011
  4. Murarka, S. P.; Gutmann, R. J.; Kaloeros, A. E.; Lanford, W. A. Thin Solid Films 1993, 236, 257. https://doi.org/10.1016/0040-6090(93)90680-N
  5. Suzuki, S.; Ishikawa, Y.; Isshiki, M.; Waseda, Y. Mater. Trans. JIM 1997, 38, 1004. https://doi.org/10.2320/matertrans1989.38.1004
  6. Gong, Y. S.; Lee, C.; Yang, C. K. J. Appl. Phys. 1995, 77, 5422. https://doi.org/10.1063/1.359234
  7. Laurie, A. B.; Norton, M. L. Mater. Res. Bull. 1989, 24, 213. https://doi.org/10.1016/0025-5408(89)90128-1
  8. Laurie, A. B.; Norton, M. L. Mater. Res. Bull. 1989, 24, 1521. https://doi.org/10.1016/0025-5408(89)90163-3
  9. Ottosson, M.; Carlsson, J. O. Surf. Coat. Technol. 1996, 78, 263. https://doi.org/10.1016/0257-8972(95)02415-8
  10. Santra, K.; Sarkar, C. K.; Mukheriee, M. K.; Ghosh, B. Thin Solid Films 1992, 213, 226. https://doi.org/10.1016/0040-6090(92)90286-K
  11. Drobny, V. F.; Palfrey, D. L. Thin Solid Films 1979, 61, 89. https://doi.org/10.1016/0040-6090(79)90504-2
  12. Prater, W. L.; Allen, E. L.; Lee, W. Y.; Toney, M. F.; Kellock, A.; Daniels, J. S. J. Appl. Phys. 2005, 97, 093301. https://doi.org/10.1063/1.1886275
  13. Pletea, M.; Bruckner, W.; Wendrock, H.; Kaltofen, R. J. Appl. Phys. 2005, 97, 054908. https://doi.org/10.1063/1.1858062
  14. Ma, C. Y.; Lapostolle, F.; Briois, P.; Zhang, Q. Y. Appl. Surf. Sci. 2007, 53, 8718.
  15. Borg, H. J.; van den Oetelaar, C. C. A.; van Ijzendoorn, L. J.; Niemantsverdriet, J. W. J. Vac. Sci. Technol. A 1992, 10, 2737. https://doi.org/10.1116/1.577902
  16. Morales, J.; Caballero, A.; Holgado, J. P.; Espinos, J. P.; Gonzalez-Elipe, A. R. J. Phys. Chem. B 2002, 106, 10185. https://doi.org/10.1021/jp026082q
  17. Ai, Z.; Zhang, L.; Lee, S.; Ho, W. J. Phys. Chem. C 2009, 113, 20896. https://doi.org/10.1021/jp9083647
  18. Yoon, K. H.; Choi, W. J.; Kang, D. H. Thin Solid Films 2000, 372, 250. https://doi.org/10.1016/S0040-6090(00)01058-0
  19. Lee, S. Y.; Nguyen, M. N.; Sun, Y. M.; White, J. M. Appl. Surf. Sci. 2003, 206, 102. https://doi.org/10.1016/S0169-4332(02)01239-4
  20. Long, J.; Dong, J.; Wang, X.; Ding, Z.; Zhang, Z.; Wu, L.; Li, Z.; Fu, X. J. Colloid Interface Sci. 2009, 333, 791. https://doi.org/10.1016/j.jcis.2009.02.036
  21. Zhang, G.; Long, J.; Wang, X.; Dai, W.; Li, Z.; Wu, L.; Fu, X. New J. Chem. 2009, 33, 2044. https://doi.org/10.1039/b906352h
  22. Galakhov, V. R.; Peteryaev, A. I.; Kurmaev, E. Z.; Anisimov, V. I. Phys. Rev. B 1007, 56, 4584.
  23. Learmonth, T.; McGuinness, C.; Glans, P. A.; Kennedy, B.; John, J. S.; Guo, J. H.; Greenblatt, M.; Smith, K. E. Phys. Rev. B 2009, 79, 8.
  24. Scanlon, D. O.; Watson, G. W.; Payne, D. J.; Atkinson, G. R.; Egdell, R. G.; Law, D. S. L. J. Phys. Chem. C 2010, 114, 4636. https://doi.org/10.1021/jp9093172
  25. Bebensee, F.; Voigts, F.; Maus-Friedrichs, W. Surf. Sci. 2008, 602, 1622. https://doi.org/10.1016/j.susc.2008.02.011
  26. Yu, Q.; Ma, X.; Lan, Z.; Wang, M.; Yu, C. J. Phys. Chem. C 2009, 113, 6969. https://doi.org/10.1021/jp809564c
  27. Nakano, Y.; Saeki, S.; Morikawa, T. Appl. Phys. Lett. 2009, 94, 022111. https://doi.org/10.1063/1.3072804
  28. Langford, J. I.; Wilson, A. J. C. J. Appl. Cryst. 1978, 11, 102. https://doi.org/10.1107/S0021889878012844
  29. Tsai, D.-C.; Huang, Y.-L.; Lin, S.-R.; Liang, S.-C.; Shieu, F.-S. Appl. Surf. Sci. 2010, 257, 1361. https://doi.org/10.1016/j.apsusc.2010.08.078

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