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나노스템프 구동용 중공형 압전액추에이터 기본특성에 관한 연구

Study on Basic Characteristics of Hollow Piezoelectric Actuator for Driving Nanoscale Stamp

  • 박중호 (한국기계연구원 에너지플랜트연구본부) ;
  • 이후승 (한국기계연구원 에너지플랜트연구본부) ;
  • 이재종 (한국기계연구원 나노융합. 생산시스템연구본부) ;
  • 윤소남 (한국기계연구원 에너지플랜트연구본부) ;
  • 함영복 (한국기계연구원 에너지플랜트연구본부) ;
  • 장성철 (한국폴리텍항공대학 항공메카트로닉스과)
  • Park, Jung-Ho (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Hu-Seung (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Yun, So-Nam (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Ham, Young-Bog (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Jang, Sung-Cheol (Dept. of Aviation Mechatronics, Korea Aviation Polytechnic)
  • 투고 : 2010.12.16
  • 심사 : 2011.07.18
  • 발행 : 2011.09.01

초록

최근, MEMS/NEMS 기술을 이용하여 기능성 나노 구조물을 제작하기 위한 공정기술 중에, 마스터 스템프에 형성된 나노패턴을 웨이퍼 등에 복제할 수 있는 나노임프린트 리소그래피 기술이 활발히 연구되고 있다. 본 연구에서는 기존 멀티헤드방식 나노임프린팅 장비에서 사용되던 전동모터를 대신하여 플렉셔 메커니즘과 결합된 나노스템프를 구동하기 위한 사각 형상의 중공형 압전액추에이터를 설계, 제작하였으며, 제조공정이 다른 각각의 시제품의 변위, 발생력 및 응답특성에 관한 검토를 수행한다. 또한, 압전 액추에이터의 변위제어에 대한 제어수법을 간단히 소개하였으며, 제작한 프로토타입의 PI제어기에 의한 변위 제어결과를 소개한다.

Nanoimprint lithography has been actively investigated. This method can replicate a nanopatterned master stamp onto a thin polymer film on a silicon substrate and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly developed. This actuator is used for driving a nanoscale stamp in nanoimprint lithography instead of a conventional electric motor. The fabricated prototype actuator has 95 layers and side lengths of 23 mm and 18 mm for the outer and inner squares, respectively. By adopting a novel process instead of the conventional forming process for fabricating a one-layer actuator, the one-layer is composed of four rectangular segments produced by sawing a ceramic film with a thickness of 0.3 mm. The basic characteristics on displacement and generation force of the fabricated prototype actuator are experimentally investigated. Furthermore, the displacement characteristics obtained by using a PI controller are tested and discussed.

키워드

참고문헌

  1. Lee, J.-J., Park, S.-Y., Choi, K.-B. and Kim, G.-H., 2008, "Nano-Scale Patterning Using the Roll Typed UV-Nanoimprint Lithography Tool," Microelectronic Engineering, Vol. 85, No. 5-6, pp. 861-865. https://doi.org/10.1016/j.mee.2007.12.059
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  6. Park, J.-H., Lee, H.-S., Lee, J.-J., Choi, K.-B. Yun, S.-N., Ham, Y.-B. and Wang, Y.-S., 2010, "Basic Characteristics of Hollow Piezoelectric Actuator for Positioning Nanoscale Stamp," Proceedings of ACTUATOR 2010, pp. 597-600.
  7. Park, S.-Y., Kim, G.-H., Choi, K.-B. and Lee, J.-J., 2010, "Fabrication of a 3D Stamp with the Microand Nano-Scale Patterens Through Combined NIL and Optical Lithography Processes," Microelectronic Engineering, Vol. 87, pp. 968-971. https://doi.org/10.1016/j.mee.2009.11.132