Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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UV/Thermal Hybrid Nanoimprint System for Flexible Substrates

유연기판을 위한 UV/Thermal 하이브리드방식 나노임프린트 시스템

  • 임형준 (한국기계연구원 나노융합시스템연구본부) ;
  • 이재종 (한국기계연구원 나노융합시스템연구본부) ;
  • 최기봉 (한국기계연구원 나노융합시스템연구본부) ;
  • 김기홍 (한국기계연구원 나노융합시스템연구본부) ;
  • 안현진 (한국기계연구원 나노융합시스템연구본부) ;
  • 류지형 (과학기술연합대학원대학교 나노메카트로닉스학과)
  • Received : 2011.05.04
  • Accepted : 2011.06.02
  • Published : 2011.06.15
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Abstract

An UV/thermal hybrid nanoimprint lithography system was designed and implemented for the pattern transfer to flexible substrates. This system can utilize a plate stamp, roll stamp, and film stamp. For all cases of using those stamps, this system is also switchable an UV or thermal nanoimprint lithography mode. This paper shows how to design the heating and UV curing plates and proposes how to change them easily. Because the pressure condition and the speed of the press roller varies by the characteristics of the stamp and substrate, all the parameters related to the nanoimprint lithography have to adjustable. Some transferred patterns are shown in this paper to verify the performance of the hybrid nanoimprint lithography system. The flexible substrates with nano-scale patterns on them will be key components for next generation technologies such as flexible displays, bendable semi-conductors, and solar cells.

Keywords

References

  1. Park, J., Chae, H., Chung, H., and Lee, S., 2011, "Thin Film Encapsulation for Flexible AM-OLED: a review," Semicond. Sci. Technol., Vol. 26, No. 3, p. 03401.
  2. Sun, D., Timmermans, M. Y., Tian, Y., Nasibulin, A. G., Kauppinen, E. I., Kishimoto, S., Mizutani, T., and Ohno, Y., 2011, "Flexible High-performance Carbon Nanotube Integrated Circuits," Nature Nanotechnology, Vol. 6, No. 3, pp. 156-161. https://doi.org/10.1038/nnano.2011.1
  3. Wuerz, R., Eicke, A., Kessler, F., Rogin, P., and Yazdani-Assl, O., 2011, viewed 9 Feburary 2011, "Alternative Sodium Sources for Cu(In, Ga)Se2 Thinfilm Solar Cells on Flexible Substrates," Thin Solid Films,
  4. Tan, H., Gilvertson, A., and Chou, S. Y., 1998, "Roller Nanoimprint Lithography," J. Vac. Sci. Technol. B, Vol. 16, No. 6, pp. 3926-3928. https://doi.org/10.1116/1.590438
  5. Ahn, S., Cha, J., Myung, H., Kim, S., and Kang, S., 2006, "Continuous Ultraviolet Roll Nanoimprinting Process for Replicating Large-scale Nano- and Micropatterns," Appl. Phys. Lett., Vol. 89, No. 21, p. 213101. https://doi.org/10.1063/1.2392960
  6. Ahn, S. H., and Guo L. Jay., 2008, "High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates," Adv. Mater., Vol. 20, No. 11, pp. 2044-2049. https://doi.org/10.1002/adma.200702650
  7. Lee, J., Park, S., Choi, K., and Kim, G., 2008, "Nanoscale Patterning using the Roll Typed UV-nanoimprint Lithography Tool," Microelectron. Eng., Vol. 85, No. 5, pp. 861-865. https://doi.org/10.1016/j.mee.2007.12.059
  8. Stuart, C., and Chen, Y., "Roll in and Roll out: A Path to High-Throughput Nanoimprint Lithography," ACS Nano, Vol. 3, No. 8, pp. 2062-2064.
  9. Ahn, S. H., and Guo L. Jay., 2009, "Large-Area Rollto- Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting," ACS Nano, Vol. 3, No. 8, pp. 2304-2310. https://doi.org/10.1021/nn9003633
  10. Han, J., Choi, S., Lim, J., Lee, B. S., and Kang, S., 2009, "Fabrication of Transparent Conductive Tracks and Patterns on Flexible Substrate using a Continuous UV Roll Imprint Lithography," J. Phys. D: Appl. Phys., Vol. 42, No. 11, p. 115503. https://doi.org/10.1088/0022-3727/42/11/115503
  11. Lee, H., Hong, S., Yang, K., and Choi, K., 2006, "Fabrication of Nano-sized Resist Patterns on Flexible Plastic Film using Thermal Curing Nano-imprint Lithography," Microelectron. Eng., Vol. 83, No. 2, pp. 323-327. https://doi.org/10.1016/j.mee.2005.09.006
  12. Lee, M. G., Shuhuai, L., Lee, S.-H., Lee, H.-J., Ni, J., and Sung, Y.-W., 2009, "Development of Roll-to-Flat Thermal Imprinting Equipment and Experimental Stury of Large Area Pattern Replication on Polymer Substrate," Journal of the Korean Society of Machine Tool Engineers, Vol. 18, No. 3, pp. 307-314.
  13. Lim, H., Lee, J., Choi, K., Kim, G., and Ryu, J., 2011, "Design and Implementation of Nanoimprint Lithography System for Flexible Substrate," Journal of the Korean Society for Precision Engineering, Vol. 28, No. 4, pp. 513-520.
  14. Lim, H., Choi, K., Kim, G., Park, S., Ryu, J., and Lee, J., 2011, viewed 8 Feburary 2011, "Roller Nanoimprint Lithography for Flexible Electronic Devices of a Submicron Scale," Microelectron. Eng.,