Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design and Implementation of Nanoimprint Lithography System for Flexible Substrates

유연기판을 위한 나노임프린트리소그래피 시스템 설계

  • Lim, Hyung-Jun (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Choi, Kee-Bong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Gee-Hong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Ryu, Ji-Hyeong (Department of Nano Mechatronics, University of Science and Technology)
  • 임형준 (한국기계연구원 나노융합생산시스템연구본부) ;
  • 이재종 (한국기계연구원 나노융합생산시스템연구본부) ;
  • 최기봉 (한국기계연구원 나노융합생산시스템연구본부) ;
  • 김기홍 (한국기계연구원 나노융합생산시스템연구본부) ;
  • 류지형 (과학기술연합대학원대학교 나노메카트로닉스학과)
  • Received : 2010.08.02
  • Accepted : 2011.01.27
  • Published : 2011.04.01
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Abstract

The NIL processes have been studied to implement low cost, high throughput and high resolution application. A RNIL(roller NIL) is an alternative approach to flat nanoimprint lithography. RNIL process is necessary to transfer patterns on flexible substrates. Compared with flat NIL, RNIL has the advantages of better uniformity, less pressing force, and the ability to repeat the patterning process continuously on a large substrate. This paper studies the design, construction and verification of a thermal RNIL system. The proposed RNIL system can easily adopt the flat shaped hot plate which is one of the most important technologies for NIL. The NIL system can be used to transfer patterns from a flexible stamp to a flexible substrate, from a flexible stamp to a Si substrate, and from a roller stamp to a flexible substrate, etc. Patterning on flexible substrates is one of the key technologies to produce bendable displays, solar cells and other applications.

Keywords

References

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