전자회절을 이용한 격자상수의 측정 정확도 향상

Accuracy Improvement of Lattice Parameters Measured from Electron Diffraction Data

  • Lee, Sang-Gil (Division of Electron Microscopic Research, Korea Basic Science Institute) ;
  • Song, Kyung (Division of Electron Microscopic Research, Korea Basic Science Institute) ;
  • Kim, Jin-Gyu (Division of Electron Microscopic Research, Korea Basic Science Institute)
  • 투고 : 2011.02.27
  • 심사 : 2011.03.21
  • 발행 : 2011.03.31

초록

For quantitative analysis of nano-crystal structure, we reported the accuracy improvement method of lattice parameters measured from electron diffraction. For calculation of Au lattice parameters used as a standard crystal structure, it was considered two different acquisition methods (detector and enegy-filter) and three different calculation methods (conventional, least-square and regression fit). As a result, the measurement reliability could be enhanced by using CCD camera which gives higher performance, while energy-filtering did not affect the improvement the camera constant accuracy. Also, the accuracy of lattice parameters could be improved up to $10^{-4}$ order by regression fitting with correction formula. Finally, it is expected that the combination of regression fitting and intensity extraction from energy-filtered precession electron diffraction gives a solution of quantitative structure analysis for unknown nano-crystals.

키워드

참고문헌

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