Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Simulation of the Radial Overcut in Micro Electrochemical Machining

미세 전해 가공에서 반경 방향 오버컷 예측을 위한 시뮬레이션

  • Kim, Bo-Hyun (Department of Mechanical Engineering, Soongsil Univ.) ;
  • Shin, Hong-Shik (School of Mechanical Engineering, Seoul National Univ.) ;
  • Oh, Young-Tak (Department of Mechanical Engineering, Ansan College of Tech.) ;
  • Lee, Kang-Hee (School of Robot and Automation Engineering, DongYang Mirae Univ.) ;
  • Chu, Chong-Nam (School of Mechanical Engineering, Seoul National Univ.)
  • 김보현 (숭실대학교 기계공학과) ;
  • 신홍식 (서울대학교 기계공학과) ;
  • 오영탁 (안산공과대학 기계과) ;
  • 이강희 (동양미래대학 로봇자동화공학부) ;
  • 주종남 (서울대학교 기계공학과)
  • Received : 2010.10.12
  • Accepted : 2010.11.25
  • Published : 2011.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

The radial overcut in micro electrochemical machining was investigated. The prediction of overcut is important not only for the machining accuracy but also for the shape control of micro structures. In micro ECM, machining gap or overcut depends on electrolyte, pulse voltage, pulse duration and dissolution time etc. Understanding of electrochemical dissolution rate is necessary for the overcut prediction. In this paper, the radial overcut of micro electrochemical machining according to pulse duration and dissolution time was simulated using electrochemical principles and also experimentally estimated.

Keywords

References

  1. Schuster, R., Kirchiner, V., Allongue, P. and Etrl, G., "Electrochemical Micromachining," Science, Vol. 289, No. 5476, pp. 98-101, 2000. https://doi.org/10.1126/science.289.5476.98
  2. Kim, B. H., Ryu, S. H., Choi, D. K. and Chu, C. N., "Micro Electrochemical Milling," Journal of Micromechanics and Microengineering, Vol. 15, No. 1, pp. 124-129, 2005. https://doi.org/10.1088/0960-1317/15/1/019
  3. Kenney, J. A. and Hwang, G. S., "Etch Trends in Electrochemical Machining with Ultrashort Voltage Pulses," Electrochemical and Solid-State Letters, Vol. 9, No. 1, pp. D1-D4, 2006. https://doi.org/10.1149/1.2136250
  4. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., "Localized Electro-chemical Micro Drilling Using Ultra Short Pulses," Journal of the Korean Society for Precision Engineering, Vol. 20, No. 8, pp. 213-220, 2003.
  5. Cagnon, L., Kirchner, V., Kock, M., Schuster, R., Ertl, G., Gmelin, W. T. and Kuck, H., "Electrochemical Micromachining of Stainless Steel by Ultra Short Voltage Pulses," Zeitschrift für Physikalische Chemie, Vol. 217, No. 4, pp. 299-313, 2003. https://doi.org/10.1524/zpch.217.4.299.20383
  6. Masuzawa, T., "State of the Art of Micromachining," Annals of the CIRP, Vol. 49, No. 2, pp. 473-488, 2000. https://doi.org/10.1016/S0007-8506(07)63451-9
  7. Paik, W. K. and Park, S. M., "Electrochemistry: Science and Technology of Electrode Processes," Cheongmoongak, pp. 39-56, 2001.
  8. Bard, A. J. and Faulkner, L. R., "Electrochemical Methods: Fundamentals and Applications, 2nd Ed.," John Wiley & Sons, pp. 98-99, 2000.