참고문헌
- Robbins, W. and Hietala, A., 1988, A Simple Phenomenological Model of Tunable SAW Devices Using Magnetostrictive Thin Films, IEEE Trans. Ultrason. Ferroelect., Freq. Contr., Vol. 35, No. 6, pp. 718-722. https://doi.org/10.1109/58.9328
- Reindl, L., Scholl, G., Ostertag, T., Scherr, H., Wolff, U. and Schmidt, F., 1998, Theory and Application of Passive SAW Radio Transponders as Sensors, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 45, No. 5, pp. 1281-1292. https://doi.org/10.1109/58.726455
- Steindl, R., Hausleitner, C., Pohl, A., Hauser, H. and Nicolics, J., 1999, Giant Magneto-impedance Magnetic Field Sensor with Surface Acoustic Wave Technology, in Proc. Eurosensors, Delft, The Netherlands.
- Atashbar, M. Z., Bazuin, B. J., Simpeh, M. and Krishnamurthy, S., 2004, 3-D Finite-element Simulation Model of SAW Palladium Thin Film Hydrogen Sensor, IEEE Int'l Ultrason., Ferroelect., Freq. Joint 50th Anniversary Conference, pp. 549-553. https://doi.org/10.1109/FREQ.2004.1418517
- Maurel, A., Pagneux, V., Barra, F. and Lund, F., 2010, Surface Acoustic Waves in Interaction with a Dislocation, Ultrason., Vol. 50, No. 2, pp. 161-166. https://doi.org/10.1016/j.ultras.2009.09.020
- Bao, X. Q., Burghard, W., Varadan, V. V. and Varadan, K. V., 1987, SAW Temperature Sensor and Remote Reading System, Proc. IEEE Ultrason. Symp., pp. 583-585. https://doi.org/10.1109/ULTSYM.1987.199024
- Schimetta, G., Dollinger, F. and Weigel, R., 2000, A Wireless Pressure-measurement System Using a Saw Hybrid Sensor, IEEE Trans. Microw. Theory Tech. Vol. 48, No. 12, pp. 2730-2735. https://doi.org/10.1109/22.899037
- Pohl, A., Seifert, F., Reindl, L., Scholl, G., Ostertag, T. and Pietsch, W., 1994, Radio Signals for ID Tags and Sensors in Strong Electromagnetic Interference, Proc. IEEE Ultrason. Symp., pp. 195-198. https://doi.org/10.1109/ULTSYM.1994.401578
- Oh, J.-G., Choi, B. and Lee, S.-Y., 2008, SAW Based Passive Sensor with Passive Signal Conditioning Using MEMS A/D Converter, Sens. Actuators A, Vol. 141, No. 2, pp. 631-639. https://doi.org/10.1016/j.sna.2007.09.012
- Kim, J., Lee, T.-J., Lim, S.-C., Park, N.-C., Park, Y.-P. and Park, K.-S., 2010, Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 20, No. 5, pp. 437-443. https://doi.org/10.5050/KSNVE.2010.20.5.437
- Campbell, C. K., 1998, Surface Acoustic Wave Devices for Mobile and Wireless Communications, Academic Press, San Diego.
- Subramanian, H., Varadan, V. K., Varadan, V. V. and Vellekoop, M. J., 1997, Design and Fabrication of Wireless Remotely Readable MEMS Based Microaccelerometers, Smart Mater. Struct. Vol. 6, No. 6, pp. 730-738. https://doi.org/10.1088/0964-1726/6/6/010
- Jones, S. W., 2000, Photolithography, IC Knowledge LLC.
- Chapra, S. C. and Canale, R. P., 2003, Numerical Methods for Engineers, McGraw Hill, New York.