Bulletin of the Korean Chemical Society

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Volatile Nickel Aminoalkoxide Complexes as Liquid Precursors for Non-volatile Memory Device of NiO Films by ALD

  • Chung, Taek-Mo (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Lee, Sun-Sook (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Cho, Won-Tae (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Min-Chan (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Lee, Young-Kuk (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Hwang, Jin-Ha (Department of Materials Engineering, Hongik University) ;
  • An, Ki-Seok (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Chang-Gyoun (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • Received : 2010.12.13
  • Accepted : 2011.01.06
  • Published : 2011.03.20
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References

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