Journal of the Korea Institute of Military Science and Technology (한국군사과학기술학회지)

The Korea Institute of Military Science and Technology (한국군사과학기술학회)
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A Review of Ion Beam Technology

이온빔 기술 리뷰

  • 이태호 (한국과학기술정보 연구원 ReSeat 프로그램)
  • Received : 2011.10.02
  • Accepted : 2011.11.25
  • Published : 2011.12.05
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Abstract

In this paper, ion beam technology was investigated through the published papers. Ion beam technology is mainly used by the focused ion beams. There are two different types of application methods. One method is to remove the material from the substrate, the other one is to deposit the materials on the surface of the substrate or specimen. Based on the literature review there are 1.5 times more published research papers related to the deposition than those of the removal.

Keywords

References

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