Journal of the Korean Magnetics Society (한국자기학회지)

The Korean Magnetics Society (한국자기학회)
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Fabrication and Property of Water Level and Temperature Sensor for Medical Cooling System Using a Highly Sensitive GMR-SV Device

거대자기저항 스핀밸브 소자를 이용한 의료용 냉각기 수위 및 수온 센서의 제작과 특성

  • Park, Kwang-Jun (Department of Oriental Biomedical Engineering, Sangji University) ;
  • Choi, Jong-Gu (Department of Western-Eastern Biomedical Engineering, Sangji University) ;
  • Lee, Sang-Suk (Department of Oriental Biomedical Engineering, Sangji University) ;
  • Lee, Bum-Ju (Jejoong Medical Co., Ltd.)
  • 박광준 (상지대학교 보건과학대학 한방의료공학과) ;
  • 최종구 (상지대학교 일반대학원 동서의료공학과) ;
  • 이상석 (상지대학교 보건과학대학 한방의료공학과) ;
  • 이범주 ((주)제중메디컬)
  • Received : 2010.12.22
  • Accepted : 2011.02.18
  • Published : 2011.02.28
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Abstract

We fabricated a sensor for measuring the water level and water temperature using GMR-SV (giant magnetoresistance-spin valve) device, simultaneously. It could be applied to the medical cooling system of the potassium titanylphosphate KTP) laser system for the therapy of a benign prostatic hyperplasia. The middle point of GMR-SV device was set to the near position of a high magnetic sensitivity with 2.8%/Oe. The sensitivity for the water level and water temperature of the fabricated sensor were $400\;m{\Omega}/mm$ and $100\;m{\Omega}/^{\circ}C$, respectively.

DC 마그네트론 스퍼터링을 이용하여 제작한 고감도 거대자기저항 스핀밸브 박막 소자를 이용하여 수위 및 수온을 측정할 수 있는 센서를 제작하였다. 제작한 센서의 수위 및 수온 분해능은 각각 $400\;m{\Omega}/mm$와 $100\;m{\Omega}/^{\circ}C$ 이었으며, 이는 전립선 비대증 KTP(potassium titanyl phosphate) 레이저 치료기에서 냉각기의 수위 및 수온을 조절하는 센서로써 응용이 가능하다.

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