한국해양공학회지 (Journal of Ocean Engineering and Technology)

  • 제25권1호
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  • Pages.39-43
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  • 2011
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  • 1225-0767(pISSN)
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  • 2287-6715(eISSN)
한국해양공학회 (Korean Society of Ocean Engineers)
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ZnO/Ag Multilayer의 투과율과 전도성에 관한 연구

The Study of Transmittance and Conductivity in ZnO/Ag Multilayer Films

  • Kim, Yun-Hae (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Kim, Do-Wan (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Murakami, Ri-Ichi (Dept. of Mechanical Engineering, The University of Tokushima) ;
  • Moon, Kyung-Man (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Lee, Sung-Yul (Dept. of Mechanical and Materials Engineering, Korea Maritime University)
  • 투고 : 2010.10.20
  • 심사 : 2011.02.16
  • 발행 : 2011.02.28
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초록

This study has lowered the specific resistance by coating a thin film layer of Ag, playing the role of the electron donor on the ZnO that is used usefully for the transparent conductive oxides. Presently, this study has examined the transmittance and electric characteristics according to the thickness of the Ag thin film layer. Also, this study has observed the transmittance and electric characteristics according to the uppermost ZnO thin film layer of ZnO/Ag/ZnO symmetric film and has conducted the theoretical investigation. In order to observe the transmittance and electric characteristics according to the thickness of the Ag thin film layer and the uppermost ZnO thin film layer, this study conducted the film deposition at room temperature while making use of the DC magnetron sputtering system. In order to see the changes in the thickness of the Ag thin film layer, this study coated a thin film while increasing by 4nm; and, in order to see the changes in the thickness of uppermost ZnO thin film layer, it performed the thin film coating by increasing by 5nm. From the experimental result, the researchers observed that the best transmittance could be obtained when the thickness of the Ag thin film layer was 8nm, but the resistance and mobility increased as the thickness got larger. On the other hand, when the thickness of the uppermost ZnO thin film layer was 20nm, the experiment yielded the best transmittance with excellent electric characteristics. Also, when compared the ZnO/Ag asymmetric film with the ZnO/Ag/ZnO symmetric film, the ZnO/Ag asymmetric film showed better transmittance and electric characteristics.

키워드

참고문헌

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피인용 문헌

  1. Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering vol.12, pp.6, 2013, https://doi.org/10.1109/TNANO.2013.2274596