Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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The Effect of Thicknesses on Magnetic Properties of Fe-Hf-N Soft Magnetic Thin Films

Fe-Hf-N 연자성 박막의 자기적 특성에 미치는 박막 두께의 영향

  • Choi, Jong-Won (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Kang, Kae-Myung (Department of Materials Science and Engineering, Seoul National University of Science and Technology)
  • 최종운 (서울과학기술대학교 신소재공학과) ;
  • 강계명 (서울과학기술대학교 신소재공학과)
  • Received : 2011.10.20
  • Accepted : 2011.12.30
  • Published : 2011.12.31
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Abstract

The thickness dependence of magnetic properties was experimentally investigated in nanocrystalline Fe-Hf-N thin films fabricated by a RF magnetron sputtering method. In order to investigate the thickness effect on their magnetic properties, the films are prepared with different thickness ranges from 90 nm to 330 nm. It was revealed that the coercivity of the thin film increased with film thickness. On the contrary, the saturation magnetization decreased with film thickness. On the basis of the SEM and TEM, an amorphous phase forms during initial growth stage and it changes to crystalline structure after heat treatment at $550^{\circ}C$. Nanocrystalline Fe-Hf-N particles are also generated.

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References

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