청정기술 (Clean Technology)

  • 제17권3호
  • /
  • Pages.250-258
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  • 2011
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  • 1598-9712(pISSN)
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  • 2288-0690(eISSN)
한국청정기술학회 (The Korean Society of Clean Technology)
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Large Scale Treatment of Perfluorocompounds Using a Thermal Plasma Scrubber

  • Han, Sung-Han (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Park, Hyun-Woo (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Kim, Tae-Hee (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Park, Dong-Wha (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University)
  • 투고 : 2011.06.10
  • 심사 : 2011.08.12
  • 발행 : 2011.09.30
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초록

Thermal plasma has been presented for the decomposition of perfluorocompounds (PFCs) which are extensively used in the semiconductor manufacturing and display industry. We developed pilot-scale equipment to investigate the large scale treatment of PFCs and called it a "thermal plasma scrubber". PFCs such as $CF_4$, $C_2F_6$, $SF_6$, and $NF_3$ used in experiments were diluted with $N_2$. There were two different types of experiment setup related to the water spray direction inside the thermal plasma scrubber. The first type was that the water was sprayed directly into the gas outlet located at the exit of the reaction section. The second type was that the water was sprayed on the wall of the quenching section. More effective decomposition took place when the water was sprayed on the quenching section wall. For $C_2F_6$, $SF_6$, and $NF_3$ the maximum destruction and removal efficiency was nearly 100%, and for $CF_4$ was up to 93%.

키워드

참고문헌

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피인용 문헌

  1. 아크 플라즈마를 이용한 과불화합물 처리공정에서 반응가스에 의한 효과 vol.19, pp.2, 2011, https://doi.org/10.7464/ksct.2013.19.2.113
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