한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제19권4호
  • /
  • Pages.553-561
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  • 2010
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

평면형 구조와 Halbach 자석배열 선형모터를 이용한 리니어 XY 스테이지의 설계

Design of Linear XY Stage using Planar Configuration and Linear Motors with Halbach Magnet Array

  • 투고 : 2010.06.28
  • 심사 : 2010.08.04
  • 발행 : 2010.08.15
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초록

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

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참고문헌

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