Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Investigations on Microcrystalline Silicon Films for Solar Cell Application

  • Hwang, Hae-Sook (Department of Applied Chemistry, Daejon University) ;
  • Park, Min-Gyu (Korea Research Institute of Standards and Science) ;
  • Ruh, Hyun (Korea Research Institute of Standards and Science) ;
  • Yu, Hyun-Ung (Korea Research Institute of Standards and Science)
  • Received : 2010.04.27
  • Accepted : 2010.08.27
  • Published : 2010.10.20
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Abstract

Hydrogenated microcrystalline silicon (${\mu}c$-Si:H) thin film for solar cells is prepared by plasma-enhanced chemical vapor deposition and physical properties of the ${\mu}c$-Si:H p-layer has been investigated. With respect to stable efficiency, this film is expected to surpass the performance of conventional amorphous silicon based solar cells and very soon be a close competitor to other thin film photovoltaic materials. Silicon in various structural forms has a direct effect on the efficiency of solar cell devices with different electron mobility and photon conversion. A Raman microscope is adopted to study the degree of crystallinity of Si film by analyzing the integrated intensity peaks at 480, 510 and $520\;cm^{-1}$, which corresponds to the amorphous phase (a-Si:H), microcrystalline (${\mu}c$-Si:H) and large crystals (c-Si), respectively. The crystal volume fraction is calculated from the ratio of the crystalline and the amorphous phase. The results are compared with high-resolution transmission electron microscopy (HR-TEM) for the determination of crystallinity factor. Optical properties such as refractive index, extinction coefficient, and band gap are studied with reflectance spectra.

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