한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제43권3호
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  • Pages.121-126
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  • 2010
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
DOI QR코드

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양극산화 시간 및 전류밀도 변화에 따른 다공질 실리콘의 특성 변화

Effects of Current Density and Anodization Time on the Properties of Porous Si

  • 최현영 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 김민수 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 김군식 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 조민영 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 전수민 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 임광국 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과) ;
  • 이동율 (삼성 LED) ;
  • 김진수 (전북대학교 신소재공학부) ;
  • 김종수 (영남대학교 물리학과) ;
  • 임재영 (인제대학교 나노메뉴팩처링연구소 나노시스템공학과)
  • Choi, Hyun-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Kim, Min-Su (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Kim, Ghun-Sik (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Cho, Min-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Jeon, Su-Min (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Yim, Kwang-Gug (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Lee, Dong-Yul (Samsung LED) ;
  • Kim, Jin-Soo (Division of Advanced Materials Engineering, Chonbuk National University) ;
  • Kim, Jong-Su (Department of Physics, Yeungnam University) ;
  • Leem, Jae-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
  • 투고 : 2010.06.15
  • 심사 : 2010.06.29
  • 발행 : 2010.06.30
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초록

The PS(porous Si) were fabricated with different anodization time and current density. The structural and optical properties of PS were investigated by SEM(scanning electron microscopy), AFM(atomic force microscopy), and PL(photoluminescence). It is found that the pore size and surface roughness of PS are proportional to the current density. The PL spectra show that the PL peak position is red-shifted with increasing anodization time. This behavior corresponds to the change of pore size which is consistent with the quantum confinement model. The FWHM(full width at half maximum) of PL peak is decreased from 97 to 51 nm and the PL peak position is blue-shifted with increasing current density up to 10 mA/$cm^2$. The PL peak intensity of the PS fabricated under 1 mA/$cm^2$ is the highest among samples.

키워드

참고문헌

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피인용 문헌

  1. Fabrication and Characterization of Hydrogen Getter Based on Palladium Oxide Doped Nanoporous SiO2/Si Substrate vol.24, pp.11, 2014, https://doi.org/10.3740/MRSK.2014.24.11.573