Acknowledgement
Supported by : 한국과학재단
References
- J. K. Luo, A. J. Flewitt, S. M. Spearing, N. A. Fleck and W. I. Milne, "Young's modulus of electroplated Ni thin film for MEMS applications," Materials Letters, Vol. 58, pp. 2306-2309 (2004) https://doi.org/10.1016/S0167-577X(04)00137-5
- S. U. Jen and T. C. Wu, "Young's modulus and hardness of Pd thin films," Thin Solid Films, Vol. 492, pp. 166-172 (2005) https://doi.org/10.1016/j.tsf.2005.06.048
- E. C. Jeon, D. I. Kwon, Y. Choi and J. I. Jang, "Nondestructive advanced indentation technique: The application study from industrial structure to nanomaterial," Journal of the Korean Society for Nondestructive Testing, Vol. 22, No. 4, pp. 333-346 (2002)
- Z. S. Li, Q. F. Fang, S. Veprek and S. Z. Li, "Evaluation of the internal friction and elastic modulus of the superhard films," Materials Science and Engineering: A, Vol. 370, pp. 186-190 (2004) https://doi.org/10.1016/j.msea.2003.09.048
- S. H. Kim, "Determination of mechanical properties of electroplated Ni thin film using the resonance method," Materials Letters, Vol. 61, pp. 3589-3592 (2007) https://doi.org/10.1016/j.matlet.2006.11.130
- C. L. Dai and Y. M. Chang, "A resonant method for determining mechanical properties of Si3N4 and SiO2 thin films," Materials Letters, Vol. 61, pp. 3089-3092 (2007) https://doi.org/10.1016/j.matlet.2006.11.031
- Z. S. Li, Q. F. Fang, S. Veprek and S. Z. Li, "Evaluation of the internal friction and elastic modulus of the superhard films," Materials Science and Engineering: A, Vol. 370, pp. 186-190 (2004) https://doi.org/10.1016/j.msea.2003.09.048
- M. J. Bamber, K. E. Cooke, A. B. Mann and B. Derby, "Accurate determination of Young's modulus and Poisson's ratio of thin films by a combination of acoustic microscopy and nanoindentation," Thin Solid Films, Vol. 398-399, pp. 299-305 (2001) https://doi.org/10.1016/S0040-6090(01)01341-4
- H. S. Cao, J. J. Hunsinger and O. Elkedim, "Determination of elastic modulus of nanocrystalline iron and titanium of acoustic microscopy," Scripta Materialia, Vol. 46, pp.55-60 (2005)
- M. Doghmane, F. Hadjoub, A. Doghmane and Z. Hadjoub, "Approaches for evaluating Young's and shear moduli in terms of a single SAW velocity via the SAM technique," Materials Letters, Vol. 61, pp. 813-816 (2007) https://doi.org/10.1016/j.matlet.2006.05.080
- A. Benbelghit, D. Boutassouna, B. Helifa and I. K. Lefkaier "Determination of the elastic properties of some coated materials by simulation of the analogue signal of the reflection acoustic microscope," NDT&E International, Vol. 39, pp. 76-81 (2006) https://doi.org/10.1016/j.ndteint.2005.06.004
- H. Akamatsu, T. Fujinami, Z. Horita and T. G. Langdon, "Influence of rolling on the superplastic behavior of an Al-Mg-Sc alloy after ECAP," Scripta Materialia, Vol. 44, pp. 759-764 (2001) https://doi.org/10.1016/S1359-6462(00)00666-7
- E. A. El-Danaf, M. S. Soliman, A. A. Almajid and M. M. EI-Rayes, "Enhancement of mechanical properties and grain size refinement of commercial purity aluminum 1050 processed by ECAP," Materials Science and Engineering: A, Vol. 458, pp. 226-234 (2007) https://doi.org/10.1016/j.msea.2006.12.077
- K. Matoy, H. Schonherr, T. Detzel, T. Schoberl, R. Pippan, C. Motz and G. Dehm, "A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films, "Thin Solid Film, Vol. 518, pp. 247-256 (2009) https://doi.org/10.1016/j.tsf.2009.07.143
- Y. Gaillard, E. Jimenez-Pique, F. Soldera, F. Mucklich and M. Anglada, "Quantification of hydrothermal degradation in zirconia by nanoindentation," Acta Materialia, Vol. 56, pp. 4206-4216 (2008) https://doi.org/10.1016/j.actamat.2008.04.050
- S. Parthasarathi, B. R. Tittmann and R. J. Ianno, "Quantitative acoustic microscopy for characterization of the interface strength of diamond-like carbon thin films," Thin Solid Films, Vol. 300, pp. 42-50 (1997) https://doi.org/10.1016/S0040-6090(96)09501-6
- J. M. R. Weaver, M. G. Somekh, A. D. Briggs, S. D. Peck and C. IInett, "Applications of the scanning reflection acoustic microscope to the study of materials science," IEEE Transactions on Sonics Ultrasonics, Vol. SU-32, No. 2, pp. 302-312 (1985)
- H. S. Ju and B. R. Tittmann, "Recent advances in scanning acoustic microscopy for adhesion evaluation on thin films," Journal of the Korean Society for Nondestructive Testing, Vol. 29, No. 6, pp. 534-549 (2009)
- 김정석, 김용권, 박익근, 권숙인, "표면파를 이용한 쇼트 피닝된 Al 7075 합금의 잔류응력 평가", 비파괴검사학회지, Vol. 26, No. 5, pp. 291-296 (2006)
- C. S. Kim, D. S. Cho and I. K. Park, "Ultrasonic characterization of residual stress in shot peened Al 7075 alloy using acoustic signature," Key Engineering Materials, Vol. 321-323, pp. 1475-1478 (2006) https://doi.org/10.4028/www.scientific.net/KEM.321-323.1475
- L. Robert, N. Brunet, T. Flaherty, T. Randles, E. Matthaei-Schulz, H. Vetters, D. Rats and J. von Stebut, "Characterization of TiN and carbon-doped chromium thin film coatings by acoustic microscopy," Surface and Coatings Technology, Vol. 116-119, pp. 327-334 (1999) https://doi.org/10.1016/S0257-8972(99)00316-3