Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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Study on the Formation of Residual Layer Thickness by Changing Magnitude and Period of UV Imprinting Pressure

UV임프린트 공정에서 임프린팅 가압력 및 가압시간에 따른 레진 잔막 두께형성에 대한 실험연구

  • Shin, Dong-Hyuk (Graduate School of Automotive Engineering at Kookmin Univ.) ;
  • Jang, Si-Youl (School of Mechanical and Automotive Engineering, Kookmin Univ.)
  • 신동혁 (국민대학교 자동차공학전문대학원) ;
  • 장시열 (국민대학교 기계자동차 공학부)
  • Received : 2010.08.16
  • Accepted : 2010.09.18
  • Published : 2010.10.31
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Abstract

This study is focused on the resin layer formation of UV imprinting process by changing imprinting pressure and period. The mold shape is made for the process of window open over the pattern transfer area and the imprinting period is assigned as the time just before the UV light curing. The residual layer is measured by changing the imprinting period and pressure magnitude, and the measured data of residual layer provides useful information for the design of the process conditions of imprinting processes.

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References

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