Journal of the Optical Society of Korea

Optical Society of Korea (한국광학회)
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Noise-robust Phase Gradient Retrieval Formulation for Phase-shifting Interferometry

  • Park, Dae-Seo (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC)) ;
  • O, Beom-Hoan (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC)) ;
  • Park, Se-Geun (Optics and Photonics Elite Research Academy (OPERA), Inha University) ;
  • Lee, El-Hang (Optics and Photonics Elite Research Academy (OPERA), Inha University) ;
  • Park, Jae-Hyun (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC)) ;
  • Lee, Seung-Gol (SEM Co. - Inha University, Precision Inspection and Measurement Center (PIMC))
  • Received : 2010.01.04
  • Accepted : 2010.04.05
  • Published : 2010.06.25
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Abstract

Modification of the phase gradient formulation is proposed in order to make phase retrieval less susceptible to noise. The modified formulation is derived from separation of the phase terms and the intensity modulation terms of interferograms, and subsequent differentiation to reduce the noise-induced error of the phase gradient vector. Its performance is evaluated and compared to that of the conventional formulation, and noise-robust nature is confirmed.

Keywords

References

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