Journal of the Optical Society of Korea

  • 제14권2호
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  • Pages.127-130
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  • 2010
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  • 1226-4776(pISSN)
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  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications

  • Ahn, Seung-Joon (Department of Information Display, Sun Moon University) ;
  • Oh, Tae-Sik (Department of Information Display, Sun Moon University) ;
  • Kim, Ho-Seob (Department of Information Display, Sun Moon University) ;
  • Ahn, Seong-Joon (Department of I&C Engineering, Sun Moon University)
  • 투고 : 2010.01.29
  • 심사 : 2010.03.30
  • 발행 : 2010.06.25
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초록

We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

키워드

참고문헌

  1. S.-S. Choi, J. S. Kim, E. D. Fabrizio, M. Gentili, H. B. Chung, H. J. Yoo, and B. W. Kim, “A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication,” J. Korean Phys. Soc. 32, 727-730(1998).
  2. S. Kwon, P. Kim, S. Jeong, W. Chang, C. Chun, and D.-Y. Kim, “Fabrication of nano dot and line arrays using NSOM lithography,” J. Opt. Soc. Korea 9, 16-21 (2005). https://doi.org/10.3807/JOSK.2005.9.1.016
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  8. H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, “Miniature Schottky electron source,” J. Vac. Sci. Technol. B 13, 2468-2472 (1995). https://doi.org/10.1116/1.588023
  9. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, “Experimental evaluation of a $20{\times}20$ mm footprint microcolumn,” J. Vac. Sci. Technol. B 14, 3792-3796 (1996). https://doi.org/10.1116/1.588669
  10. S. Ahn, D. W. Kim, H. S. Kim, C. G. Park, and S. J. Ahn, “Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern,” Mat. Sci. Forum 544-545, 845-848 (2007). https://doi.org/10.4028/www.scientific.net/MSF.544-545.845
  11. M. L. Yu, H.-S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, “Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings,” J. Vac. Sci. Technol. B 14, 3797-3801 (1996). https://doi.org/10.1116/1.588670

피인용 문헌

  1. Multiwalled carbon nanotube field emitter as an electron source for a microcolumn vol.34, pp.1, 2016, https://doi.org/10.1116/1.4939834
  2. Design of the miniaturized free electron laser module as an efficient source of the THz waves vol.654, pp.1, 2011, https://doi.org/10.1016/j.nima.2011.06.052
  3. Investigations on the effect of the electric fields inside the wigglers on the trajectory of the electron beam in the miniaturized FEL module vol.124, pp.17, 2013, https://doi.org/10.1016/j.ijleo.2012.08.090