Smart Structures and Systems

  • 제6권1호
  • /
  • Pages.1-16
  • /
  • 2010
  • /
  • 1738-1584(pISSN)
  • /
  • 1738-1991(eISSN)
테크노프레스 (Techno-Press)
권호 표지
DOI QR코드

DOI QR Code

Design of a smart MEMS accelerometer using nonlinear control principles

  • Hassani, Faezeh Arab (Device Simulation and Modeling Laboratory, Faculty of Electrical and Computer Engineering, Campus #2, University of Tehran) ;
  • Payam, Amir Farrokh (Device Simulation and Modeling Laboratory, Faculty of Electrical and Computer Engineering, Campus #2, University of Tehran) ;
  • Fathipour, Morteza (Device Simulation and Modeling Laboratory, Faculty of Electrical and Computer Engineering, Campus #2, University of Tehran)
  • 투고 : 2008.04.01
  • 심사 : 2009.05.01
  • 발행 : 2010.01.25
⟨ 이전 논문 다음 논문 ⟩

초록

This paper presents a novel smart MEMS accelerometer which employs a hybrid control algorithm and an estimator. This scheme is realized by adding a sliding-mode controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value as well as adding an adaptive nonlinear observer to a conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

키워드

참고문헌

  1. ADXL150/ADXL250 data sheet, Analog Devices.
  2. ANSYS software, Version. 10.
  3. Chowdhury, S., Ahmadi, M. and Miller, W.C. (2005), "Pull-In Voltage calculations for MEMS Sensors with Cantilevered Beams", The 3rd Int. IEEE-NEWCAS Conf., 143-146.
  4. Edvards, C. and Spurgeon, S.K. (1998), Sliding Mode Control, TAYLOR & FRANCIS.
  5. Kraft, M. (1997), Closed Loop Digital Accelerometer Employing Oversampling Conversion, Ph.D. thesis, Coventry University, School of Engineering, UK.
  6. Krstic, M., Kanelleskapoulas, I. and Kokotovic, P. (1995), Nonlinear and Adaptive Control design, New York, John Wiley and Sons. Inc.
  7. Lobontiu, N. and Garcia, E. (2005), Mechanics of Microelectromechanical Systems, Springer Science + Business Media, Inc.
  8. Luo, H., Zhang, G., Carley, L.R. and Fedder, G.K. (2002), "A Post-CMOS Micromachined Lateral Accelerometer", J. Microelectromech. Syst., 11,188-195. https://doi.org/10.1109/JMEMS.2002.1007397
  9. Lyshvitz, S.E. and Lyshvitz, M.A. (2000), "Analysis, Dynamics, and Control of Micro-Electromechanical Systems", Proc. of American Control Conf., Chicago, 3091-3095.
  10. Park, K., Pochiraju, K. and Varadan, V.K. (2002), "A hierarchical model for MEMS device performance simulation", SPIE Proc. Series, 4700,135-146.
  11. Park, S. and Horowitz, R. (2003), "Adaptive Control for the Conventional Mode of Operation of MEMS Gyroscopes", J. Microelectromech. Syst., 12, 101-108. https://doi.org/10.1109/JMEMS.2002.807468
  12. Slotine, J. and Jacques, E. (1991), Applied Nonlinear Control, Prentice-Hall.
  13. Spooner, J.T., Maggiore, M., Ordonez, R. and Passino, K.M. (2002), Stable Adaptive Control and Estimation for Nonlinear Systems, New York, John Wiley and Sons. Inc.
  14. System Planning Corporation (1994), Micro Electro Mechanical Systems (MEMS) an SPC market study.
  15. Vishal, G. (2000), Approaches to Synthesis of a CMOS Accelerometer, M.S. thesis, Carnegie Mellon University.
  16. Yazdi, N., Ayazi, F. and Najafi, K. (1998) "Micromachined Inertial Sensors", Proc. of the IEEE, 86, 1640-1659. https://doi.org/10.1109/5.704269
  17. Zhang, G. (1998), Design and Simulation of CMOS-MEMS accelerometer, Project Report, Carnegie Mellon University.
  18. Zhu, G., Penet, J. and Saydy, L. (2006), "Robust Control of an Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties", Proc. of the 2006 American Control Conf., Minneapolis, 1233-1238.

피인용 문헌

  1. Operational model updating of low-order horizontal axis wind turbine models for structural health monitoring applications vol.26, pp.13, 2015, https://doi.org/10.1177/1045389X14563864
  2. Analytical analysis and experimental investigation of energy loss mechanisms in rocking mass microgyroscope vol.23, pp.1, 2017, https://doi.org/10.1007/s00542-015-2713-2
  3. Period doubling of the nonlinear dynamical system of an electrostatically actuated micro-cantilever vol.14, pp.5, 2014, https://doi.org/10.12989/sss.2014.14.5.743
  4. Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source vol.2017, 2017, https://doi.org/10.1155/2017/9425190
  5. Hybrid nonlinear control of a tall tower with a pendulum absorber vol.46, pp.2, 2010, https://doi.org/10.12989/sem.2013.46.2.153
  6. Robust adaptive sliding mode control of a MEMS tunable capacitor based on dead-zone method vol.61, pp.4, 2010, https://doi.org/10.1080/00051144.2020.1806011
  7. Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer vol.27, pp.8, 2010, https://doi.org/10.1007/s00542-021-05217-0