Journal of Korean Society for Quality Management (품질경영학회지)

Korean Society for Quality Management (한국품질경영학회)
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A Fault Detection of Cyclic Signals Using Support Vector Machine-Regression

Support Vector Machine-Regression을 이용한 주기신호의 이상탐지

  • Park, Seung-Hwan (Department of Industrial Management Engineering, Korea University) ;
  • Kim, Jun-Seok (Department of Industrial Management Engineering, Korea University) ;
  • Park, Cheong-Sool (Department of Industrial Management Engineering, Korea University) ;
  • Kim, Sung-Shick (Department of Industrial Management Engineering, Korea University) ;
  • Baek, Jun-Geol (Department of Industrial Management Engineering, Korea University)
  • 박승환 (고려대학교 산업경영공학과) ;
  • 김준석 (고려대학교 산업경영공학과) ;
  • 박정술 (고려대학교 산업경영공학과) ;
  • 김성식 (고려대학교 산업경영공학과) ;
  • 백준걸 (고려대학교 산업경영공학과)
  • Received : 2010.06.03
  • Accepted : 2010.09.15
  • Published : 2010.09.30
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Abstract

This paper presents a non-linear control chart based on support vector machine regression (SVM-R) to improve the accuracy of fault detection of cyclic signals. The proposed algorithm consists of the following two steps. First, the center line of the control chart is constructed by using SVM-R. Second, we calculate control limits by variances that are estimated by perpendicular and normal line of the center line. For performance evaluation, we apply proposed algorithm to the industrial data of the chemical vapor deposition process which is one of the semiconductor processes. The proposed method has better fault detection performance than other existing method

Keywords

References

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