마그네트론 스퍼터 증착법으로 증착한 ZnO계 투명전극의 특성과 응용

  • 윤선진 (한국전자통신연구원 차세대태양광연구부) ;
  • 김준관 (한국전자통신연구원 차세대태양광연구부) ;
  • 임정욱 (한국전자통신연구원 차세대태양광연구부)
  • 발행 : 2010.10.29

초록

키워드

참고문헌

  1. M. Dudek, A. Amassian, O. Zabeida, J.E. Klemberg-Sapieha, L. Martinu, Thin Solid Films 517 4576 (2009). https://doi.org/10.1016/j.tsf.2009.01.012
  2. T. Minami, Semicond. Sci. Technol. 20, S35 (2005). https://doi.org/10.1088/0268-1242/20/4/004
  3. B. Szyszka, Thin Solid Films 351, 164 (1999). https://doi.org/10.1016/S0040-6090(99)00158-3
  4. C. Guillen, J. Herrero, Thin Solid Films 515 640 (2006). https://doi.org/10.1016/j.tsf.2005.12.227
  5. J. W. Bae, S. W. Lee, G. Y. Yeom, J. Electrochem. Soc. 154, D34 (2007). https://doi.org/10.1149/1.2382346
  6. M. Oshima, Y. Takemoto, K. Yoshino, Phys. Status Solidi C6, 1124 (2009).
  7. J. K. Kim, J. M. Lee, J. W. Lim, J. H. Kim, S. J. Yun, Jpn. J. Appl. Phys. 49, 04DP09 (2010). https://doi.org/10.1143/JJAP.49.04DP09
  8. J. K. Kim, J. M. Lee, J. W. Lim, S. J. Yun, Curr. Appl. Phys. 10, S451 (2010). https://doi.org/10.1016/j.cap.2010.01.008
  9. http://minerals.usgs.gov/minerals/pubs/commodity/ zinc/
  10. Y. R. Do, Y. C. Kim, S. -H. Cho, D. S. Zang, Y.-D. Huh, and S. J. Yun, Appl. Phys. Lett. 84, 1377 (2004). https://doi.org/10.1063/1.1650043
  11. A. Suzuki, T. Matsushita, T. Aoki, A. Mori, M. Okuda, Thin Solid FIlms 411, 23 (2002). https://doi.org/10.1016/S0040-6090(02)00167-0
  12. O. Tuna, Y. Selamet, G. Aygun, L. Ozyuzer, J. Phys.:D:Appl. Phys. 43, 055402 (2010). https://doi.org/10.1088/0022-3727/43/5/055402
  13. H. Agura, H. Suzuki, T. Matsushita, T. Aoki, M. Okuda, Thin Solid FIlms 445, 263 (2003). https://doi.org/10.1016/S0040-6090(03)01158-1
  14. T. Minami, H. Nanto, S. Tanaka, Jpn. J. Appl. Phys. 23, L280 (1984). https://doi.org/10.1143/JJAP.23.L280
  15. S. -M. Park, T. Ikegami, K. Ebihara, Thin Solid Films 513, 90 (2006). https://doi.org/10.1016/j.tsf.2006.01.051
  16. R.G. Gordon, in NREL/SNL Photovoltaics Program Review , ed. by C.E. Witt, M. Al-Jassim, J.M. Gee (AIP Press, New York, 1997), pp. 39-48.
  17. S. Fay, J. Steinhauser, R. Schl"Nuchter, L. Feitknecht, C. Ballif, A. Shah, in Proc. of the 15th International Photovoltaic Science and Engineering Conference (Shanghai, China, 2005), pp. 559-560.
  18. C. Guillen, J. Herrero, Thin Solid Films 515, 640 (2006). https://doi.org/10.1016/j.tsf.2005.12.227
  19. B. Szyszka, Thin Solid Films 351, 164 (1999). https://doi.org/10.1016/S0040-6090(99)00158-3
  20. T. Wallendorf, S. Marke, C. May, J. Stru¨mpfel, Surf. Coatings Technol. 174-175, 222 (2003). https://doi.org/10.1016/S0257-8972(03)00696-0
  21. O. Kluth, G. Scho¨pe, B. Rech, R. Menner, M. Oertel, K. Orgassa, H. W. Schock, Thin Solid Films 502, 311 ((2006). https://doi.org/10.1016/j.tsf.2005.07.313
  22. J. -H. Lee, J. -T. Song, Thin Solid Films 516, 1377 (2008). https://doi.org/10.1016/j.tsf.2007.03.078
  23. C. Li, M. Furuta, T. Hiramatsu, H. Furuta, and T. Hirao, Thin Solid Films 517, 3265 (2009). https://doi.org/10.1016/j.tsf.2008.11.103
  24. X. J. Wang, Q. S. Lei, W. Xu, W. L. Zhou, and J. Yu, Mater. Lett. 63, 1371 (2009). https://doi.org/10.1016/j.matlet.2008.12.027
  25. R. Wang, L. L. H. King, and A. W. Sleight, J. Mater. Res.11, 1659 (1996). https://doi.org/10.1557/JMR.1996.0208
  26. X. Yu, J. Ma, F. Ji, Y. Wang, X. Zhang, C. Cheng, and H. Ma, Appl. Surf. Sci. 239, 222 (2005). https://doi.org/10.1016/j.apsusc.2004.05.266
  27. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, and R. Martins, Thin Solid Films 427, 401 (2003). https://doi.org/10.1016/S0040-6090(02)01184-7
  28. E. Fortunato, L. Raniero, L. Silva, A. Goncalves, A. Pimentel, P. Barquinha, H. Aguas, L. Pereira, G. Goncalves, I. Ferreira, E. Elangocan, and R. Martins, Sol. Energy Mater. Sol. Cells 92, 1605 (2008). https://doi.org/10.1016/j.solmat.2008.07.009
  29. X. Yu, J. Ma, F. Ji, Y. Wang, X. Zhang, C. Cheng, and H. Ma, Thin Solid Films 483, 296 (2005). https://doi.org/10.1016/j.tsf.2005.01.013
  30. X. Yu, J. Ma, F. Ji, Y. Wang, X. Zhang, C. Cheng, and H. Ma, J. Cryst. Growth 274, 474 (2005). https://doi.org/10.1016/j.jcrysgro.2004.10.037
  31. V. Assuncao, E. Fortunato, A. Marques, A. Goncalves, I. Ferreira, H. Aguas, and R. Martins, Thin Solid Films 442, 102 (2003). https://doi.org/10.1016/S0040-6090(03)00955-6
  32. Q. B. Ma, Z. Z. Ye, H. P He, J. R. Wang, L. P. Zhu, and B. H. Zhao, Vacuum 82, 9 (2008).
  33. Q. B. Ma, Z. Z. Ye, H. P He, J. R. Wang, L. P. Zhu, J. R. Wang and B. H. Zhao, Mater. Lett. 61, 2460 (2007). https://doi.org/10.1016/j.matlet.2006.09.038
  34. M. Miyazaki, K. Sato, A. Mitsui, and H. Nihimura, J. Non-Cryst. Solids 218, 323 (1997). https://doi.org/10.1016/S0022-3093(97)00241-X
  35. S. Fay, J. Steinhauser, S. Nicolay, C. Ballif, Thin Solid Films 518, 2961 (2010). https://doi.org/10.1016/j.tsf.2009.09.189
  36. J. J. Robbins, J. Harvey, J. Leaf, C. Fry, C.A. Wolden, Thin Solid Films 473, 35 (2005). https://doi.org/10.1016/j.tsf.2004.06.154
  37. J. I. Owen, J. Hupkes, E. Bunte, S. E. Pust, A. Gordijn, 25th European Photovoltaic Solar Energy Conf. 2010 (Valencia, Spain) Abstract No.3AV.1.24.