Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effect of Ammonia Gas on Growth of Chemically Vapor-Deposited Carbon Nanotubes

화학기상증착법에 의한 탄소나노튜브의 성장에 미치는 암모니아 가스의 영향

  • Lee, Dong-Gu (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
  • 이동구 (금오공과대학교 정보나노소재공학)
  • Published : 2010.05.01
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Abstract

Carbon nanotubes (CNTs) were synthesized by Fe-catalytic chemical vapor deposition (CVD) method about $800^{\circ}C$. The influence of process parameters such as pretreatment conditions, gas flow ratio, processing time, etc on the growth of CNTs was investigated by field emission scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. Ammonia was added to acetylene source gas before and during the CNT growth. Different types of CNTs formed depending upon the processing condition. It was found that ammonia prevented amorphous carbons from adsorbing to the outer wall of CNT, resulting in purification of CNTs during CNT growth.

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