참고문헌
-
박창순, 선호정, “금속유기분해법으로 제조한
$ZrTiO_4$ 박막의 미세구조 및 고주파 유전특성”, 전기전자재학회논문지, 22권, 1호, p. 53, 2009. https://doi.org/10.4313/JKEM.2009.22.1.053 - E. S. Ramakrishnan, K. D. Cornett, G. H. Shapiro, and W.-Y. Howng, "Dielectric properties of radio frequency magnetron sputter deposited zirconium titanate-based thin films", J. Electrochem. Soc., Vol. 145, No. 1, p. 358, 1998. https://doi.org/10.1149/1.1838260
- Y. Park, Y. H. Kim, and H. G. Kim, “The phase transition and microwave dielectric properties of tin modified zircornium titanate by melting process”, Mater. Sci. Eng. B, Vol. 40, p. 37, 1996. https://doi.org/10.1016/0921-5107(96)01578-4
-
H. Tamura, “Microwave loss quality of
$(Zr_{0.8}Sn_{0.2})TiO_4$ ”, Am. Ceram. Soc. Bull., Vol. 73, No. 10, p. 92, 1994. -
S.-I. Hirano, T. Hayashi, and A. Hattori,
“Chemical processing and microwave
characteristics of
$(Zr,Sn)TiO_4$ microvace dielectrics”, J. Am. Ceram. Soc., Vol. 74. No. 6, p. 1320, 1991. https://doi.org/10.1111/j.1151-2916.1991.tb04105.x -
H.-J. Sun, B.-Y. Jang, Y.-H. Jung, S.-J. Lee,
and S. Nahm, “
$BaTi_4O_9$ thin film prepared by rf magnetron sputtering for microwave applications”, Jpn. J. Appl. Phys., Vol. 43, No. 5A, p. L628, 2004. https://doi.org/10.1143/JJAP.43.L628 -
B. J. Kim, Y. H. Jeong, B. Y. Jang, J. B.
Lim, S. Nahm, H.-J. Sun, and H. J. Lee,
“
$BaSm_2T_{i4}O_{12}$ thin film for high-performance metal-insulator-metal capacitors”, IEEE Electron Device Lett., Vol. 27, No. 9, p. 740, 2006. https://doi.org/10.1109/LED.2006.881085 -
B.-Y. Jang, B.-J. Kim, S.-J. Lee, K.-J. Lee, S. Nahm, H.-J. Sun, and H.-J. Lee, “
$BaTi_4O_9$ thin films for high-performance metalinsulator-metal capacitors”, Appl. Phys. Lett., Vol. 87, p. 112902, 2005. https://doi.org/10.1063/1.2048827