Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication of super hydrophilic TiO2 thin film by a liquid phase deposition

액상증착법에 의한 초친수 TiO2 박막 제조

  • Jung, Hyun-Ho (Korea Institute of Ceramic Engineering and Technology, Electronic & Optic Material Center) ;
  • Kim, Jin-Ho (Korea Institute of Ceramic Engineering and Technology, Electronic & Optic Material Center) ;
  • Hwang, Jong-Hee (Korea Institute of Ceramic Engineering and Technology, Electronic & Optic Material Center) ;
  • Lim, Tae-Young (Korea Institute of Ceramic Engineering and Technology, Electronic & Optic Material Center) ;
  • Choi, Duk-Gun (Korea Institute of Ceramic Engineering and Technology, Electronic & Optic Material Center)
  • 정현호 (한국세라믹기술원 전자.광소재센터) ;
  • 김진호 (한국세라믹기술원 전자.광소재센터) ;
  • 황종희 (한국세라믹기술원 전자.광소재센터) ;
  • 임태영 (한국세라믹기술원 전자.광소재센터) ;
  • 최덕균 (한국세라믹기술원 전자.광소재센터)
  • Received : 2010.09.17
  • Accepted : 2010.10.11
  • Published : 2010.10.31
Download PDF
⟨ Previous Next ⟩

Abstract

Super hydrophilic $TiO_2$ thin films with photocatalytic property were successfully fabricated on a glass substrate by liquid phase deposition (LPD). The $TiO_2$ thin film formed nano particles on a surface at $70^{\circ}C$. As an immersion time in $TiF_4$ solution increased, the thickness of thin films gradually increased. $TiO_2$ thin film showed a water contact angel of below ca. $5^{\circ}$ and the transmittance of ca. 75~90 % in visible range. In addition, $TiO_2$ thin film showed the photocatalytic property to decompose methyl orange solution by the illumination of UV light. The surface morphologies, optical properties and contact angel of prepared thin films with a different immersion time were measured by field emission scanning electron microscope (FE-SEM), atomic force microscope (AFM), UV-Vis spectrophotometer and contact angle meter.

광촉매 특성을 지닌 초친수 $TiO_2$ 박막을 액상증착법에 의해 유리 기판 위에 성공적으로 제조하였다. 제조된 $TiO_2$ 박막은 $70^{\circ}C$에서 박막표면에 $TiO_2$ 나노 입자들을 형성하였다. $TiF_4$ 용액의 침적시간이 증가됨에 따라 박막의 두께도 일정하게 증가되었다. $TiO_2$ 박막은 약 $5^{\circ}$ 이하의 접촉각과 가시영역에서 약 75~90 %의 투과율을 보여주었다. 또한 제조된 $TiO_2$ 박막은 자외선 조사에 의해 메칠오렌지 용액을 분해하는 광촉매 특성을 보여주었다. 침적시간 조건에 따라 제조된 박막의 표면 구조, 광학적 특성, 접촉각을 FE-SEM, AFM, UV-Vis, contact angle meter를 이용하여 측정하였다.

Keywords

References

  1. E.T. Fitzgibbons, K.J. Sladek, W.H. Hartwig and J. Electrochem, "$TiO_{2}$ film properties as a function of processing temperature", J. Electrochem. Soc. 119 (1972) 735. https://doi.org/10.1149/1.2404316
  2. R. Wang, K. Hashimoto, A. Fujishima, M. Chikni, E. Kojima, A. Kitamura and M. Shimohigoshi, "Photogeneration of highly amphiphilic $TiO_{2}$ surfaces", Advanced Material 2 (1998) 135.
  3. F. Saylkan, M. Asilturk, P. Tater, N. Kiraz, S. Sener, E. Arpac and H. Saykan, "Photocatalytic performance of Sn-doped $TiO_{2}$", Materials Research Bulletin 43 (2008) 127. https://doi.org/10.1016/j.materresbull.2007.02.012
  4. P. Chrysicopoulou, D. Davazoglou, Chr. Trapalis and G. Kordas, "Optical properties of very thin (< 100 nm) solgel $TiO_{2}$", Thin Solid Films 323 (1998) 188. https://doi.org/10.1016/S0040-6090(97)01018-3
  5. M. Takeuchi, T. Itoh and H. Nagasaka, "Dielectric properties of sputtered $TiO_{2}$ films", Thin Solids Films 51 (1978) 83. https://doi.org/10.1016/0040-6090(78)90215-8
  6. K.S. Yeung and Y.W. Lam, "A simple chemical vapour deposition method for depositing thin $TiO_{2}$ films", Thin Solids Films 109 (1983) 169. https://doi.org/10.1016/0040-6090(83)90136-0
  7. J.H. Kim and S. Shiratori, "Characterization of $TiO_{2}$/ Polyelectrolyte thin film fabricated by a layer-by-layer self-assembly method", Jpn. J. Appl. Phys. 44 (2005) 7588. https://doi.org/10.1143/JJAP.44.7588
  8. Y. Tsuge, J.H. Kim, Y. Sone, O. Kuwaki and S. Shiratori, "Fabrication of transparent $TiO_{2}$ film with high adhesion by using self-assembly method: Application to super-hydrophilic film", Thin Solid Films 516 (2008) 2463. https://doi.org/10.1016/j.tsf.2007.04.084
  9. M. keshmiri, M. Mohseni and T. Troczynski, "Development of novel $TiO_{2}$ sol-gel-derived composite and its photocatalytic activities for trichloroethylene oxidation", Appl. Catal. B: Environ. 53 (2004) 209. https://doi.org/10.1016/j.apcatb.2004.05.016