Journal of the Korean Magnetics Society (한국자기학회지)

The Korean Magnetics Society (한국자기학회)
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Microstructures and Magnetic Properties of Multiferroic BiFeO3 Thin Films Deposited by RF Magnetron Sputtering Method

RF 마그네트론 스퍼터링법으로 증착된 Multiferroic BiFeO3 박막의 미세구조 및 자기적 특성

  • Song, Jong-Han (Electric Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Nam, Joong-Hee (Electric Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kang, Dae-Sik (Electric Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jung-Ho (Electric Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Byung-Ik (Electric Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Duck-Kyun (Thin Film Electronic Materials Laboratory, Hanyang University) ;
  • Chun, Myoung-Pyo (Electric Component Center, Korea Institute of Ceramic Engineering and Technology)
  • 송종한 (한국세라믹기술원 전자부품센터) ;
  • 남중희 (한국세라믹기술원 전자부품센터) ;
  • 강대식 (한국세라믹기술원 전자부품센터) ;
  • 조정호 (한국세라믹기술원 전자부품센터) ;
  • 김병익 (한국세라믹기술원 전자부품센터) ;
  • 최덕균 (한양대학교 신소재공학과) ;
  • 전명표 (한국세라믹기술원 전자부품센터)
  • Received : 2010.09.29
  • Accepted : 2010.12.15
  • Published : 2010.12.31
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Abstract

$BiFeO_3$ (BFO) thin films were deposited on Pt/Ti/$SiO_2$/Si(100) substrates by RF magnetron sputtering method at room temperature. The influence of the flow rate of $O_2$ gas on the preparation of $BiFeO_3$ thin films was studied. XRD results indicate that the $BiFeO_3$ thin films were crystallized to the perovskite structure with the presence of small amount of impurity phases. The flow rate of $O_2$ gas has great affect on the microstructures and magnetic properties of $BiFeO_3$ thin films. As flow rate of $O_2$ gas increased, roughness and grain size of the thin films increased. $BiFeO_3$ thin films exhibited weak ferromagnetic behavior at room temperature. The PFM images revealed correlation between the surface morphology and the piezoresponse, indicating that the piezoelectric coefficient is related to microstructure.

RF 마그네트론 스퍼터링법을 이용하여 Pt/Ti/$SiO_2$/Si(100) 기판위에 $BiFeO_3$ 박막을 증착하였고, 스퍼터링 공정에서 산소량이 $BiFeO_3$ 박막에 미치는 영향을 조사하였다. $BiFeO_3$ 박막은 XRD 회절패턴의 결과를 통하여 소량의 불순물상이 존재하는 페로브스카이트 구조로 결정화되었다. $O_2$ 가스의 유량은 박막의 미세구조 및 자기적 특성에 많은 영향을 끼친다. $O_2$ 가스의 유량이 증가함에 따라 박막의 표면 거칠기 및 grain size가 증가하였다. $BiFeO_3$ 박막은 상온에서 약자성적인 거동을 보였으며, PFM 측정을 통하여 박막의 미세구조와 압전계수와의 상관관계를 조사하였다.

Keywords

References

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