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Patterned Growth of ZnO Semiconducting Nanowires and its Field Emission Properties

ZnO 반도체 나노선의 패턴 성장 및 전계방출 특성

  • Lee, Yong-Koo (Department of Electronic Engineering, Chungju National University) ;
  • Park, Jae-Hwan (Department of Electronic Engineering, Chungju National University) ;
  • Choi, Young-Jin (Nano-Materials Center, Korea Institute of Science and Technology) ;
  • Park, Jae-Gwan (Nano-Materials Center, Korea Institute of Science and Technology)
  • 이용구 (충주대학교 전자공학과) ;
  • 박재환 (충주대학교 전자공학과) ;
  • 최영진 (한국과학기술연구원 나노재료센터) ;
  • 박재관 (한국과학기술연구원 나노재료센터)
  • Received : 2010.07.28
  • Accepted : 2010.08.04
  • Published : 2010.11.30

Abstract

We synthesized ZnO nanowires patterned on Si substrate and investigated the field emission properties of the nanowires. Firstly, Au catalyst layers were fabricated on Si substrate by photo-lithography and lift-off process. The diameter of Au pattern was $50\;{\mu}m$ and the pattern was arrayed as $4{\times}4$. ZnO nanowires were grown on the Au catalyst pattern by the aid of Au liquid phase. The orientation of the ZnO nanowires was vertical on the whole. Sufficient brightness was obtained when the electric field was $5.4\;V/{\mu}m$ and the emission current was $5\;mA/cm^2$. The threshold electric field was $5.4\;V/{\mu}m$ in the $4{\times}4$ array of ZnO nanowires, which is quite lower than that of the nanowires grown on the flat Si substrate. The lower threshold electric field of the patterned ZnO nanowires could be attributed to their vertical orientation of the ZnO nanowires.

Keywords

References

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