참고문헌
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J. Teva et al., "VHF CMOS-MEMS Resonator Monolithically Integrated in a Standard 0.35
$\mu$ m CMOS Technology," Proc. MEMS, 2007, pp. 779-782. - P. Rantakari et al., “Reducing the Effect of Parasitic Capacitance on MEMS Measurements,” Proc. Transducers/Eurosensors XV, June 2001, pp. 1156-1159.
- J.R. Clark et al., “High-Q UHF Micromechanical Radial Contour Mode Disk Resonators,” J. Microelectromech. Syst., vol. 14, no. 6, 2005, pp. 1298-1310. https://doi.org/10.1109/JMEMS.2005.856675
- A. Uranga et al., “Fully Integrated MIXLER Based on VHF CMOS-MEMS Clamped-Clamped Beam Resonator,” IEE Electron. Lett., vol. 43, 2007, pp. 452-454. https://doi.org/10.1049/el:20070580
- J.L. Lopez et al., “High Q CMOS-MEMS Resonators and Its Applications as RF Tunable Band-Pass Filters,” Proc. Transducers, June 2009, pp. 557-560.
- C.-C. Lo et al., “On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators,” Proc. Transducers, June 2007, pp. 2449-2452.
피인용 문헌
- Zero-level packaging of MEMS in standard CMOS technology vol.20, pp.6, 2010, https://doi.org/10.1088/0960-1317/20/6/064009
- Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification vol.38, pp.2, 2016, https://doi.org/10.4218/etrij.16.2515.0015
- Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration vol.19, pp.8, 2009, https://doi.org/10.3390/s19081895