Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of Oxygen on the Microstructure and Mechanical Properties of Cr-O-N Coatings

Oxygen 함량에 따른 Cr-O-N 코팅막의 미세구조 및 기계적 특성에 관한 연구

  • Yun, Jun-Seo (School of Materials Science and Engineering, Pusan National University) ;
  • Kwon, Se-Hun (National Core Research Center for Hybrid Materials Solution, Pusan National University) ;
  • Park, In-Wook (Advanced Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines) ;
  • Lee, Jeong-Du (School of Materials Science and Engineering, Pusan National University) ;
  • Kim, Kwang-Ho (School of Materials Science and Engineering, Pusan National University)
  • 윤준서 (부산대학교 재료공학부) ;
  • 권세훈 (부산대학교 하이브리드소재 솔루션 국가핵심연구센터) ;
  • 박인욱 (콜로라도 광업대학교 차세대 코팅 및 표면처리 연구실) ;
  • 이정두 (부산대학교 재료공학부) ;
  • 김광호 (부산대학교 재료공학부)
  • Published : 2009.10.31
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Abstract

Cr-O-N coatings having different oxygen contents were deposited on Si wafer and SUS 304 substrates by an arc ion plating technique using Cr target in $Ar/O_2/N_2$ gaseous atmosphere. As increasing oxygen content in the coating, the microstructure of Cr-O-N coating changed from polycrystalline having NaCl structure to amorphous structure. Further increase of oxygen content resulted in phase transformation from amorphous to rhombohedral structure. From the variations of d value and average grain size, it was revealed that the maximum solubility of oxygen in Cr-O-N coating was about 21 at.%. And the maximum micro-hardness of 2751HK was obtained in this composition. The lowest friction coefficient was measured in the coating having 34.8 at.% of oxygen. However, more narrow width of wear track was found in the coating having 30.1 at.% of oxygen.

Keywords

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