한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

유한요소해석과 광선추적을 연계한 주사전자 현미경 대물렌즈의 설계 및 해석

Design and Analysis of an Objective Lens for a Scanning Electron Microscope by Coupling FE Analysis and Ray Tracing

  • 박근 (서울산업대학교 기계설계.자동화공학부) ;
  • 이재진 (서울산업대학교 기계설계.자동화공학부) ;
  • 박만진 (서울대학교 기계항공공학부) ;
  • 김동환 (서울산업대학교 기계설계.자동화공학부) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과)
  • Park, Keun (Mechanical Design and Automation Engineering, Seoul National Univ of Technology) ;
  • Lee, Jae-Jin (Mechanical Design and Automation Engineering, Seoul National Univ of Technology) ;
  • Park, Man-Jin (Graduate School of Mechanical and Aerospace Engineering, Seoul National Univ.) ;
  • Kim, Dong-Hwan (Mechanical Design and Automation Engineering, Seoul National Univ of Technology) ;
  • Jang, Dong-Young (Industrial Information and System Engineering, Seoul National Univ. of Technology)
  • 발행 : 2009.11.01
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초록

The scanning electron microscope (SEM) contains an electron optical system in which electrons are emitted and moved to form a focused beam, and generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present study covers the design and analysis of an objective lens for a thermionic SEM. A finite element (FE) analysis for the objective lens is performed to analyze its magnetic characteristics for various lens designs. Relevant beam trajectories are also investigated by tracing the ray path of the electron beams under the magnetic fields inside the objective lens.

키워드

참고문헌

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