한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제18권5호
  • /
  • Pages.455-461
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  • 2009
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

전자현미경의 이미지 향상을 위한 주사시스템의 안정성

Scanning System Stability for Improving SEM Image

  • 김승재 (서울산업대학교 나노생산기술연구소) ;
  • 김동환 (서울산업대학교 기계설계자동화공학부)
  • 발행 : 2009.10.15
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초록

In a scanning electron microscopy, image distortion is a critical issue and it is needed to be eliminated by some kinds of schemes. In this work, scanning frequency and scanning wave form are adjusted to have an improved image. The relationship between scan coil and its driver is investigated and appropriate frequency and wave form are suggested. It is proved that the selected frequency and wave form showed an enhanced image with less distortion, which were done by experiments. In addition, a noise elimination is addressed, providing improved image with a GROUND signal integration with the amplifier and the scan driver.

키워드

참고문헌

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