The local polishing of material surface using the $CO_2$ laser

$CO_2$ 레이저를 이용한 시료 표면의 국부 폴리싱

  • 김영섭 (광주과학기술원 고등광기술연구소) ;
  • 손익부 (광주과학기술원 고등광기술연구소) ;
  • 노영철 (광주과학기술원 고등광기술연구소)
  • Published : 2009.06.30

Abstract

In this paper, we study experimentally the local polishing of $SiO_2$ surface using the $CO_2$ laser. For laser local polishing, we polished to remove the grooves or to be reformed the surface of grooves after forming the grooves on the material surface. We measured the reflectance, transmittance, and beam profile in order to measure the roughness of polished surface. The Atom Force Microscope (AFM) is used to measure roughness of local polishing surface. We can predict that the laser polishing contribute to the removal of generated debris and surface roughness on the micro processing.

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