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피인용 문헌
- Electrical resistivity change in Al:ZnO thin films dynamically deposited by bipolar pulsed direct-current sputtering and a remote plasma source vol.28, pp.4, 2010, https://doi.org/10.1116/1.3435326
- The effects of impurity and temperature for transparent conducting oxide properties of Al:ZnO deposited by dc magnetron sputtering vol.86, pp.10, 2012, https://doi.org/10.1016/j.vacuum.2012.02.025
- Fabrication and Study of Transparent Conductive Films ZnO(Al) and ZnO(AlGa) by DC Magnetron Sputtering vol.22, pp.3, 2013, https://doi.org/10.5757/JKVS.2013.22.3.119