Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of 3-DOF Parallel Manipulator Using Flexure Hinge

유연 힌지를 이용한 초정밀 3자유도 병렬 매니퓰레이터 개발

  • Published : 2009.07.01
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Abstract

We present a $3-{\underline{P}}RS$ compliant parallel manipulator actuated by PZTs. The motion ranges are $400-{\mu}m$ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than $0.1{\mu}m$. The system shows resonance near 86 Hz with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.

Keywords

References

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