산업공학 (IE interfaces)

  • 제22권1호
  • /
  • Pages.73-84
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  • 2009
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  • 1225-0996(pISSN)
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  • 2234-6465(eISSN)
대한산업공학회 (Korean Institute of Industrial Engineers)
권호 표지

반도체 Fab의 생산운영시스템 구축을 위한 상황적응형 디스패칭 방법론 : 공정전환시간이 있는 장비를 중심으로

An Adaptive Dispatching Architecture for Constructing a Factory Operating System of Semiconductor Fabrication : Focused on Machines with Setup Times

  • 정근채 (충북대학교 토목공학부)
  • 투고 : 2008.09.24
  • 심사 : 2008.12.26
  • 발행 : 2009.03.01
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초록

In this paper, we propose a dispatching algorithm for constructing a Factory Operating System (FOS) which can operate semiconductor fabrication factories more efficiently and effectively. We first define ten dispatching criteria and propose two methods to apply the defined dispatching criteria sequentially and simultaneously (i.e. fixed dispatching architecture). However the fixed type methods cannot apply the criteria adaptively by considering changes in the semiconductor fabrication factories. To overcome this type of weakness, an adaptive dispatching architecture is proposed for applying the dispatching criteria dynamically based on the factory status. The status can be determined by combining evaluation results from the following three status criteria; target movement, workload balance, and utilization rate. Results from the shop floor in past few periods showed that the proposed methodology gives a good performance with respect to the productivity, workload balance, and machine utilization. We can expect that the proposed adaptive dispatching architecture will be used as a useful tool for operating semiconductor fabrication factories more efficiently and effectively.

키워드

참고문헌

  1. AIMSystems Inc. (2006), Introductionof nanoDSP 2.0 (AIM’sReal-timeDispatcher) , AIMSystems Inc, Seoul, Korea
  2. AkGalr, E., Uzsoy, R., Hiscock, D. G., Moser, A. L., and Teyner, T. J. (2000), Alternative Loading and Dispatching Policies for Furnace Operations in SemiconductorManufacturing:AComparison by Simulation,Proceedingsof the 2000Winter Simulation Conference, 1428-1435
  3. Asmundsson, J., Rardin, R. L., and Uzsoy, R. (2006), Tractable Nonlinear Production Planning Models for Semiconductor Wafer Fabrication Facilities, IEEE Transactions on Semiconductor Manufacturing, 19(1), 95-111 https://doi.org/10.1109/TSM.2005.863214
  4. Chen, Y-.J., Yu, G., Huang, K.-S., and Wang, I. (2000), A Next Queue Algorithm in Real Time Dispatching System of Semiconductor Manufacturing, TheNinth International Symposiumon Semiconductor Manufacturing, 67-70
  5. Gupta,A.K. and Sivakumar, A. I. (2004),Multi-objective Scheduling of Two-job Families on a SingleMachine,Omega, 33(5), 299-405
  6. Hsieh, B-.W., ChangS-.C., Chen, C-.H. and Chang, M-.C. (2003), Efficient Composition of Good Enough Dispatching Policies for Semiconductor Manufacturing,2003 IEEE International Symposiumon SemiconductorManufacturing,67-70
  7. Jeong, K.-C. (2008),Design of an AdaptiveDispatchingArchitecture for theOptimal Operation of Semiconductor Fabrications-Focused on Machines with Setup Times (ResearchReport) , Chungbuk National University, Cheongju, Korea
  8. Jeong, K.-C. and Kim, Y.-D. (1997), A Real-Time SchedulingMechanismfor a Flexible Manufacturing System: Using Simulation and Dispatching Rules, International Journal ofManufacturingSystem, 36(9), 2609-2626 https://doi.org/10.1080/002075498192733
  9. Kim, M.-H. and Kim, Y.-D. (1994), Simulation-Based Real-Time scheduling Mechanism in a Felexible Manufacturing System, Journal of Manufacturing Systems, 13(2), 85-93 https://doi.org/10.1016/0278-6125(94)90024-8
  10. Koo, P., Suh, J., and Jang, J. (2003), A New Vehicle Dispatching in Semiconductor Intra-bay Material Handling Systems, IE Interfaces, 16(Special Issue), 93-98
  11. Kuhl,M. E. and Laubisch,G. R. (2004),ASimulation Study ofDispatching Rules and Rework Strategies in Semiconductor Manufacturing, 2004 IEEE Conference andWorkshoponAdvanced SemiconductorManufacturing, 325-329
  12. Monch, L., Balasubramanian, H., Fowler, J. W., and Pfund, M. E. (2005), Heuristic Scheduling of Jobs on Parallel BatchMachines with Incompatible Job Families and Unequal Ready Times, Computers and Operations Research, 32(11), 2731-2750 https://doi.org/10.1016/j.cor.2004.04.001
  13. Monch, L. andDriebel, R. (2005), ADistributed Shifting BottleneckHeuristic for Complex Job Shops,Computers& Industrial Engineering, 49(3), 363-380 https://doi.org/10.1016/j.cie.2005.06.004
  14. Monch, L., Schabacker, R., Pabst, D., and Fowler, J.W. (2007), Genetic Algorithm-based SubproblemSolution Procedures for aModified Shifting BottleneckHeuristic for Complex Job Shops,EuropeanJournal ofOperational Research, 177(3), 2100-2118 https://doi.org/10.1016/j.ejor.2005.12.020
  15. Pierce,N.G. andYurtsever, T. (2000),Value-basedDispatching for SemiconductorWafer Fabrication,2000 IEEE/SEMIAdvancedSemiconductorManufacturing Conference, 245-249
  16. Sethi, S. P., Sriskandarajah, C., Chu, K.-F., and Yan, H. (1999), Efficient Setup/Dispatching Policies in a Semiconductor Manufacturing Facility, Proceedings of the38th ConferenceonDecision andControl Phoenix, 1368-1373
  17. Suh, J., Koo, P., Jang, J. (2003), Development of a Dispatching Logic for ControllingMaterial Handling in Semiconductor Fab, Proceedings of the2003 SpringConferenceof KIEE/KORMS, 364-368
  18. Tyan, J. C., Du, T. C., Chen, J. C., and Chang, I-.H. (2004),Multiple Response Optimization in a Fully Automated Fab: an Integrated Tool and Vehicle Dispatching Strategy,Computers& Industrial Engineering, 46(1), 121-139 https://doi.org/10.1016/j.cie.2003.11.003